Engineered Materials & Labware • Lot COA Included154 Product Lines · CAS & Formula Index · AI / Agent Ready
Fused Quartz & Substrates · TB-SUB-GLS

Borosilicate (Borofloat 33), Alkali-Free Display & FTO/ITO Glass Substrates

Epi-ready CMP-polished borosilicate (borofloat 33), Alkali-Free display & FTO/ITO glass substrates (SiO2-B2O3-Al2O3 / ITO-Glass / FTO-Glass, CAS 65997-17-3) wafers and diced research squares with sub-nanometer surface roughness for PVD, PLD, MBE, and ALD.

Alternate & search designations: Epi-ready SiO2-B2O3-Al2O3 / ITO-Glass / FTO-Glass single crystal wafer, borosilicate (borofloat 33), Alkali-Free display & FTO/ITO glass substrates thin-film growth substrate, Ø 2", 3", 4", 6" Glass Wafers (0.5 / 0.7 / 1.0 mm) & Pre-Scored 25×25 mm / 15×15 mm TCO Slides SiO2-B2O3-Al2O3 / ITO-Glass / FTO-Glass
Purity / Grade OptionsSchott Borofloat 33, Alkali-Free Display Glass, & Pre-Coated ITO/FTO Research Slides
Standard Dimensions10×10 mm, 5×5 mm, 10×5 mm, Ø 1", Ø 2", Ø 3", Ø 4" × 0.5 mm / 1.0 mm
Available Configurations1-Side (SSP) or 2-Side (DSP) Epi-Ready CMP Polish; Cleanroom 100 Pack
Ordering & MOQSpecification-based quote · Prototype & production lots

Material & Engineering Overview

Precision-grown and chemical-mechanical-polished (CMP) in a Class 100 cleanroom, our borosilicate (borofloat 33), Alkali-Free display & FTO/ITO glass substrates (SiO2-B2O3-Al2O3 / ITO-Glass / FTO-Glass, CAS 65997-17-3) substrates provide atomically smooth, epi-ready surfaces (Ra < 0.2–0.5 nm) for thin-film epitaxy, pulsed laser deposition (PLD), magnetron sputtering, molecular beam epitaxy (MBE), and optical characterization.

Engineered for MEMS anodic bonding, microfluidics, and photovoltaic device prototyping, we supply both bare low-CTE borosilicate/alkali-free glass wafers and pre-patterned or full-sheet ITO/FTO conductive glass slides. Standard research sizes include 5×5 mm, 10×10 mm, and 15×15 mm diced squares (0.5 mm or 1.0 mm thick) as well as Ø 1-inch, 2-inch, 3-inch, and 4-inch wafers in single-side (SSP) or double-side (DSP) polished finishes, packed in individual waffle trays or nitrogen-sealed cassettes with batch orientation and surface inspection data.

Standard Shipment Documentation: Manufacturer Lot COA (crystal orientation X-ray verification, surface roughness Ra, thickness tolerance, and resistivity/doping if applicable).

Primary Research & Industrial Applications

  • Anodic bonding to silicon wafers in MEMS pressure sensors and hermetically sealed packages (Borofloat 33 CTE 3.25 ppm/K)
  • Perovskite, organic (OPV), and dye-sensitized solar cell prototyping on pre-cut 7–15 Ω/sq ITO & FTO glass
  • Microfluidic lab-on-a-chip channels and bio-optical fluorescence slides
  • Thin-film PVD/ALD optical transmission witness slides

Nominal Material Reference Properties

Property / MetricNominal Reference Value (Grade Dependent)
Formula & CAS #SiO2-B2O3-Al2O3 / ITO-Glass / FTO-Glass (CAS 65997-17-3)
Crystal System / GradeAmorphous Optical Glass · Schott Borofloat 33, Alkali-Free Display Glass, & Pre-Coated ITO/FTO Research Slides
Density2.23 (Borofloat 33) / 2.38–2.51 g/cm³
Standard OrientationsØ 2", 3", 4", 6" Glass Wafers (0.5 / 0.7 / 1.0 mm) & Pre-Scored 25×25 mm / 15×15 mm TCO Slides
Surface Finish (CMP)Optical Fire/CMP Finish + Optional 7–15 Ω/sq ITO or FTO Conductive Coating

Reference values reflect typical sintered, fused, or wrought grades. Exact batch test figures are confirmed on your written quotation and accompanying lot Certificate of Analysis.

What to Specify in Your Quote Request

Specify SiO2-B2O3-Al2O3 / ITO-Glass / FTO-Glass crystallographic orientation (Ø 2", 3", 4", 6" Glass Wafers (0.5 / 0.7 / 1.0 mm) & Pre-Scored 25×25 mm / 15×15 mm TCO Slides), dimensions and thickness (e.g., 10×10×0.5 mm or Ø 2" × 0.5 mm), SSP vs. DSP polish, edge orientation, and pack count.

Include target quantity, destination country/postal code for express air freight calculation, and any special cleanroom bagging or certification requests.

Prepare Borosilicate (Borofloat 33), Alkali-Free Display & FTO/ITO Glass Substrates RFQ ↗

Technical & Procurement FAQ

Are borosilicate (borofloat 33), Alkali-Free display & FTO/ITO glass substrates (SiO2-B2O3-Al2O3 / ITO-Glass / FTO-Glass) substrates ready for epitaxial deposition out of the box?
Yes. All epi-ready substrates are final CMP-polished and packaged in cleanroom waffle packs or sealed containers with sub-nanometer Ra roughness.
What tolerances apply to 10×10×0.5 mm diced SiO2-B2O3-Al2O3 / ITO-Glass / FTO-Glass substrates?
Standard lateral dimensions are ±0.05–0.10 mm, thickness is ±0.02–0.05 mm, and crystal axis orientation accuracy is within ±0.5° (or ±0.1° on custom request).
Can I order custom sizes, thicknesses, or double-side polishing for TB-SUB-GLS?
Yes. Both single-side (SSP) and double-side (DSP) polished substrates as well as custom laser/wire-saw diced dimensions can be quoted with no high minimum order quantity.
Cross-referenced catalog

Related technical materials.

Complementary furnaceware, substrates, PVD consumables, and refractory hardware frequently ordered together.

UV Fused Silica & Optical Quartz Windows (SiO2, CAS 60676-86-0) — Fused Quartz & Substrates studio photographTB-SIO2-WN
Fused Quartz & SubstratesSiO2 · 60676-86-0

UV Fused Silica & Optical Quartz Windows

Precision double-side optically polished UV synthetic fused silica (JGS1), optical quartz (JGS2), and full-spectrum IR fused silica (JGS3) windows and wafer substrates.

Purity / GradeJGS1 (Deep-UV 185–2,100 nm) / JGS2 (UV-VIS) / JGS3 (IR Low-OH)
Typical SizeØ 5–200 mm or Square 5×5 to 150×150 mm × Thickness 0.2–20 mm
Indium Tin Oxide (In2O3:SnO2 (90:10 wt%)) Sputtering Targets (In2O3:SnO2 (90:10 wt%), CAS 50926-11-9) — Thin Film Materials studio photographTB-PVD-ITO
Thin Film MaterialsIn2O3:SnO2 (90:10 wt%) · 50926-11-9

Indium Tin Oxide (In2O3:SnO2 (90:10 wt%)) Sputtering Targets

High-density hot-pressed indium tin oxide (In2O3:SnO2 (90:10 wt%), CAS 50926-11-9) ceramic sputtering targets in 4N (99.99%) · ≥99.5% Relative Density purity, indium-bonded for arc-free RF and pulsed-DC thin-film deposition.

Purity / Grade4N (99.99%) · ≥99.5% Relative Density
Typical SizeØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)
Tin Dioxide & Antimony/Fluorine Doped (SnO2 / ATO (SnO2:Sb2O3)) Sputtering Targets (SnO2 / ATO (SnO2:Sb2O3), CAS 18282-10-5) — Thin Film Materials studio photographTB-PVD-SNO2
Thin Film MaterialsSnO2 / ATO (SnO2:Sb2O3) · 18282-10-5

Tin Dioxide & Antimony/Fluorine Doped (SnO2 / ATO (SnO2:Sb2O3)) Sputtering Targets

High-density hot-pressed tin dioxide & Antimony/Fluorine doped (SnO2 / ATO (SnO2:Sb2O3), CAS 18282-10-5) ceramic sputtering targets in 4N (99.99%) purity, indium-bonded for arc-free RF and pulsed-DC thin-film deposition.

Purity / Grade4N (99.99%)
Typical SizeØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)
Silicon Wafers & Thermal Oxide (SiO2/Si) Substrates (Si / SiO2-on-Si, CAS 7440-21-3) — Fused Quartz & Substrates studio photographTB-SUB-SI
Fused Quartz & SubstratesSi / SiO2-on-Si · 7440-21-3

Silicon Wafers & Thermal Oxide (SiO2/Si) Substrates

Epi-ready CMP-polished silicon wafers & thermal oxide (SiO2/Si) substrates (Si / SiO2-on-Si, CAS 7440-21-3) wafers and diced research squares with sub-nanometer surface roughness for PVD, PLD, MBE, and ALD.

Purity / GradePrime / Test CZ & FZ Grade (1–100 Ω·cm, Intrinsic >5,000 Ω·cm, or Degenerate 0.001–0.005 Ω·cm)
Typical Size10×10 mm, 5×5 mm, 10×5 mm, Ø 1", Ø 2", Ø 3", Ø 4" × 0.5 mm / 1.0 mm
Custom & catalog specifications

Need pricing, lead time, or custom dimensions?

Submit your purity grade, geometry, quantity, and documentation requirements. Every order includes the producing mill's batch Certificate of Analysis (COA) and pre-shipment dimensional verification.

Start a quote request ↗