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Thin Film Materials · 80 Product Lines

Thin Film Materials

PVD research and production materials including 3N–5N metal and ceramic oxide sputtering targets (ITO, ZnO, Al2O3), thermal and e-beam evaporation pellets, Cu/C/Mo/W pocket crucible liners, refractory evaporation boats, and 6 MHz QCM crystals.

Specification guidance: Specify composition, purity (3N to 5N), target diameter/thickness or pellet size, OFHC Cu/Mo backing plate and indium/elastomer bonding, pocket liner cc volume, and ICP/GDMS lot COA.
Thin Film Materials catalog photography
Quick comparison

Thin Film Materials specification matrix.

Compare SKU codes, chemical formulas, CAS numbers, purity grades, and standard dimensional envelopes.

SKUProduct LineFormulaCAS #Purity / GradeTypical DimensionsRFQ
TB-PVD-MTMetal Sputtering TargetsTi / Cr / Al / Cu / Ni / W / Mo / Ta7440-32-63N5 (99.95%) / 4N (99.99%) / 4N5 / 5N (99.999%)Ø 1", 2", 3", 4", 6", 8" × Thickness 1–12.7 mm; Rectangular platesQuote ↗
TB-PVD-OXOxide & Nitride Ceramic Sputtering TargetsITO / ZnO / Al2O3 / SiO2 / TiO2 / AlN / SiC50926-11-999.9% (3N) / 99.99% (4N) / 99.995% (4N5)Ø 1", 2", 3", 4", 6" × Thickness 2–6 mm (+ Cu Backing Plate)Quote ↗
TB-PVD-EVEvaporation MaterialsAl / Cu / Ti / Cr / Ni / Ge / SiO2 / MgF2 / TiO27429-90-54N (99.99%) / 4N5 / 5N (99.999%) Vacuum-Degassed1–3 mm & 3–6 mm granules/shots, Ø 3×3 or 6×6 mm pellets, starter sourcesQuote ↗
TB-PVD-LNE-Beam Evaporation Crucible Pocket LinersCu / C (Graphite & Vitreous) / Mo / W / Al2O3 / BN7440-50-8OFHC Cu (99.99%), Purified Graphite/Vitreous C (<20 ppm), 99.95% Mo/W2 cc, 4 cc, 7 cc, 8 cc, 15 cc, 25 cc, 30 cc, 40 cc, & 100 ccQuote ↗
TB-PVD-BTTungsten, Molybdenum & Tantalum Evaporation BoatsW / Mo / Ta7440-33-7≥99.95% W, Mo, & Ta Vacuum-Grade Refractory Sheet/WireLengths 50–150 mm × Thickness 0.005"–0.020" (0.127–0.50 mm); Wire basketsQuote ↗
TB-PVD-QCMQCM Thin-Film Deposition Monitor Crystalsα-SiO2 + Au / Ag-Al Alloy Electrodes14808-60-7AT-Cut Piezoelectric Quartz (6.0 MHz & 5.0 MHz Fundamental)Ø 13.97 mm (0.550") Plano-Convex Standard Sensor DiscsQuote ↗
TB-PVD-TITitanium (Ti) Sputtering TargetsTi7440-32-64N (99.99%) / 4N5 (99.995%) / 5NØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-CRChromium (Cr) Sputtering TargetsCr7440-47-33N5 (99.95%) / 4N (99.99%) / 4N5Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-ALAluminum (Al) Sputtering TargetsAl7429-90-54N (99.99%) / 5N (99.999%) / 5N5Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-CUCopper (Cu) Sputtering TargetsCu7440-50-84N5 (99.995%) / 5N (99.999%) / 6N OFHCØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-NINickel (Ni) Sputtering TargetsNi7440-02-04N (99.99%) / 4N5 (99.995%) / 5NØ 1", 2", 3", 4" × 1.0–2.0 mm (thin magnetic pass-through) or 3–6 mmQuote ↗
TB-PVD-WTungsten (W) Sputtering TargetsW7440-33-73N5 (99.95%) / 4N (99.99%) / 5NØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-MOMolybdenum (Mo) Sputtering TargetsMo7439-98-73N5 (99.95%) / 4N (99.99%) / 4N5Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-TATantalum (Ta) Sputtering TargetsTa7440-25-73N5 (99.95%) / 4N (99.99%) / 4N5Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-NBNiobium (Nb) Sputtering TargetsNb7440-03-13N5 (99.95%) / 4N (99.99%) / High-RRR 4N5Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-SISilicon (Si) Sputtering TargetsSi7440-21-35N (99.999%) / 6N Intrinsic, B-doped (p-type), or P-doped (n-type)Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-GEGermanium (Ge) Sputtering TargetsGe7440-56-45N (99.999%) / 6N (99.9999%) Intrinsic or Ga/Sb-DopedØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-VVanadium (V) Sputtering TargetsV7440-62-23N5 (99.95%) / 4N (99.99%)Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-ZRZirconium (Zr) Sputtering TargetsZr7440-67-73N5 (99.95% Grade 702) / 4N Low-Hf (<100 ppm Hf)Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-HFHafnium (Hf) Sputtering TargetsHf7440-58-63N5 (99.95% excl. Zr) / 4N Low-ZrØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-COCobalt (Co) Sputtering TargetsCo7440-48-43N5 (99.95%) / 4N (99.99%) / 4N5Ø 1", 2", 3", 4" × 1.0–2.0 mm (thin magnetic pass-through) or 3–6 mmQuote ↗
TB-PVD-FEIron (Fe) Sputtering TargetsFe7439-89-63N5 (99.95%) / 4N (99.99%) / 4N5Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-MNManganese (Mn) Sputtering TargetsMn7439-96-53N5 (99.95%) / 4N (99.99%)Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-ZNZinc (Zn) Sputtering TargetsZn7440-66-64N (99.99%) / 4N5 (99.995%) / 5NØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-SNTin (Sn) Sputtering TargetsSn7440-31-54N (99.99%) / 4N5 / 5N (99.999%)Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-INIndium (In) Sputtering TargetsIn7440-74-64N5 (99.995%) / 5N (99.999%) / 6NØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-BIBismuth (Bi) Sputtering TargetsBi7440-69-94N (99.99%) / 4N5 / 5N (99.999%)Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-SBAntimony (Sb) Sputtering TargetsSb7440-36-04N (99.99%) / 4N5 / 5N (99.999%)Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-TETellurium (Te) Sputtering TargetsTe13494-80-94N (99.99%) / 4N5 / 5N (99.999%)Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-YYttrium (Y) Sputtering TargetsY7440-65-53N (99.9%) / 3N5 (99.95% REM)Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-SCScandium (Sc) Sputtering TargetsSc7440-20-23N5 (99.95%) / 4N (99.99% REM)Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-RERare-Earth Metal (La, Ce, Gd, Nd, Er, Yb) (La / Ce / Gd / Nd / Er / Yb) Sputtering TargetsLa / Ce / Gd / Nd / Er / Yb7439-91-03N (99.9%) / 3N5 (99.95%) / 4N (REM basis)Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-AGSilver (Ag) Sputtering TargetsAg7440-22-44N (99.99%) / 4N5 (99.995%) / 5NØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-TIWTitanium-Tungsten (TiW 10/90) (TiW (10:90 wt% / 30:70 at.%)) Sputtering TargetsTiW (10:90 wt% / 30:70 at.%)7440-33-73N5 (99.95%) / 4N Low-Alkali Semiconductor GradeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-NICRNickel-Chromium (NiCr 80/20) (NiCr (80:20 / 60:40 / 50:50 wt%)) Sputtering TargetsNiCr (80:20 / 60:40 / 50:50 wt%)11106-97-13N5 (99.95%) / 4NØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-NIFEPermalloy (Ni80Fe20 & CoFeB) (Ni80Fe20 / Ni81Fe19 / Co40Fe40B20) Sputtering TargetsNi80Fe20 / Ni81Fe19 / Co40Fe40B2012168-54-63N5 (99.95%) / 4N Vacuum-Induction MeltedØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-ALSCAluminum-Scandium (AlSc Alloy) (Al1-xScx (Sc 5–43 at.%)) Sputtering TargetsAl1-xScx (Sc 5–43 at.%)60683-64-94N (99.99%) Vacuum-Melted / HIP IntermetallicØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-CIGSCopper-Gallium & CIGS Alloy (CuGa (70:30 / 75:25) & CuInGaSe2) Sputtering TargetsCuGa (70:30 / 75:25) & CuInGaSe257606-41-44N (99.99%) / 4N5Ø 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; RectangularQuote ↗
TB-PVD-ITOIndium Tin Oxide (In2O3:SnO2 (90:10 wt%)) Sputtering TargetsIn2O3:SnO2 (90:10 wt%)50926-11-94N (99.99%) · ≥99.5% Relative DensityØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-AZOAluminum-Doped Zinc Oxide (AZO) (ZnO:Al2O3 (98:2 wt%)) Sputtering TargetsZnO:Al2O3 (98:2 wt%)1314-13-24N (99.99%)Ø 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-ZNOZinc Oxide (ZnO) Sputtering TargetsZnO1314-13-24N (99.99%) / 4N5 / 5NØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-ALOAluminum Oxide (Alumina) (Al2O3) Sputtering TargetsAl2O31344-28-14N (99.99%) / 4N5Ø 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-SIO2Silicon Dioxide (Fused Quartz) (SiO2) Sputtering TargetsSiO260676-86-04N5 (99.995%) / 5N (99.999%)Ø 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-TIO2Titanium Dioxide (TiO2 / TiO2-x) Sputtering TargetsTiO2 / TiO2-x13463-67-74N (99.99%)Ø 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-TA2O5Tantalum Pentoxide (Ta2O5) Sputtering TargetsTa2O51314-61-04N (99.99%) / 4N5 (99.995%)Ø 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-NB2O5Niobium Pentoxide (Nb2O5) Sputtering TargetsNb2O51313-96-84N (99.99%) / 4N5Ø 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-HFO2Hafnium Dioxide (Hafnia) (HfO2) Sputtering TargetsHfO212055-23-14N (99.99% excl. Zr) / Low-Zr 4NØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-ZRO2Zirconium Dioxide & YSZ (ZrO2 / 8 mol% Y2O3-ZrO2) Sputtering TargetsZrO2 / 8 mol% Y2O3-ZrO21314-23-44N (99.99%)Ø 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-WO3Tungsten Trioxide (WO3) Sputtering TargetsWO31314-35-84N (99.99%)Ø 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-MOO3Molybdenum Trioxide (MoO3) Sputtering TargetsMoO31313-27-54N (99.99%)Ø 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-NIONickel Oxide (NiO (or Li-doped NiOx)) Sputtering TargetsNiO (or Li-doped NiOx)1313-99-14N (99.99%)Ø 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-SNO2Tin Dioxide & Antimony/Fluorine Doped (SnO2 / ATO (SnO2:Sb2O3)) Sputtering TargetsSnO2 / ATO (SnO2:Sb2O3)18282-10-54N (99.99%)Ø 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-IGZOIndium Gallium Zinc Oxide (IGZO) (InGaZnO4 (In:Ga:Zn = 1:1:1 at.%)) Sputtering TargetsInGaZnO4 (In:Ga:Zn = 1:1:1 at.%)Composition dependent; confirm supplier SDS4N (99.99%) · High-Density Conductive CeramicØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-BSTBarium Titanate & Barium Strontium Titanate (BaTiO3 / Ba1-xSrxTiO3 (BST)) Sputtering TargetsBaTiO3 / Ba1-xSrxTiO3 (BST)12047-27-73N5 (99.95%) / 4NØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-PZTLead Zirconate Titanate (PZT 52/48) (Pb(Zr0.52Ti0.48)O3 (+10–20 mol% excess PbO)) Sputtering TargetsPb(Zr0.52Ti0.48)O3 (+10–20 mol% excess PbO)12626-81-23N5 (99.95%)Ø 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-LIBSolid-State Battery Targets (LiCoO2, Li3PO4, LLZO) (LiCoO2 / Li3PO4 / LiMn2O4 / Li4Ti5O12 / LLZO) Sputtering TargetsLiCoO2 / Li3PO4 / LiMn2O4 / Li4Ti5O12 / LLZO12190-79-33N5 (99.95%) / 4N (with optional 10–15% Li excess)Ø 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-ALNAluminum Nitride (AlN) Sputtering TargetsAlN24304-00-53N5 (99.95%) / 4NØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-SI3N4Silicon Nitride (Si3N4) Sputtering TargetsSi3N412033-89-54N (99.99%)Ø 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-TINTitanium Nitride (TiN) Sputtering TargetsTiN25583-20-43N5 (99.95%) / 4NØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-SICSilicon Carbide (SiC) Sputtering TargetsSiC409-21-24N (99.99%) / 4N5Ø 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-TMD2D Transition-Metal Dichalcogenides (MoS2, WS2, MoSe2, WSe2) (MoS2 / WS2 / MoSe2 / WSe2) Sputtering TargetsMoS2 / WS2 / MoSe2 / WSe21317-33-54N (99.99%)Ø 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-PVD-ZNSZinc Sulfide & Zinc Selenide (ZnS, ZnSe) (ZnS / ZnSe) Sputtering TargetsZnS / ZnSe1314-98-34N5 (99.995%) / 5N CVD Optical GradeØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)Quote ↗
TB-EV-ALAluminum (Al) Evaporation MaterialsAl7429-90-55N (99.999%) / 5N5Ø 3×3 mm, Ø 6×6 mm, Ø 6×12 mm slugs; Ø 1–2 mm wire clipsQuote ↗
TB-EV-TITitanium (Ti) Evaporation MaterialsTi7440-32-64N5 (99.995%) / 5N (99.999%)Ø 3×3 mm & Ø 6×6 mm vacuum-degassed slugs; pre-melted hearth starter conesQuote ↗
TB-EV-CRChromium (Cr) Evaporation MaterialsCr7440-47-34N (99.99%) / 4N5 (99.995%)1–3 mm & 2–5 mm degassed chunks/granules; Cr-plated W evaporation rodsQuote ↗
TB-EV-CUCopper (Cu) Evaporation MaterialsCu7440-50-85N (99.999%) / 6N OFHCØ 3×3 mm & Ø 6×6 mm oxygen-free cylindrical slugs; 2–5 mm shotQuote ↗
TB-EV-NINickel (Ni) Evaporation MaterialsNi7440-02-04N5 (99.995%) / 5N (99.999%)Ø 3×3 mm & Ø 6×6 mm vacuum-degassed slugsQuote ↗
TB-EV-AGSilver (Ag) Evaporation MaterialsAg7440-22-44N5 (99.995%) / 5N (99.999%)Ø 3×3 mm & Ø 6×6 mm slugs; 1–3 mm vacuum-melted shotQuote ↗
TB-EV-GEGermanium (Ge) Evaporation MaterialsGe7440-56-45N (99.999%) / 6N Zone-Refined1–4 mm & 3–6 mm crystalline pieces; pre-melted hearth slugsQuote ↗
TB-EV-SIOSilicon Monoxide (SiO) Evaporation MaterialsSiO10097-28-64N (99.99%) Vacuum-Sublimed Grade2–6 mm dark brown/black vacuum-degassed chunks & granulesQuote ↗
TB-EV-SIO2Silicon Dioxide (Optical Quartz) (SiO2) Evaporation MaterialsSiO260676-86-04N5 (99.995%) / 5N1–3 mm & 2–5 mm crystal-clear fused quartz granules; e-beam starter discsQuote ↗
TB-EV-MGF2Magnesium Fluoride (MgF2) Evaporation MaterialsMgF27783-40-64N5 (99.995%) Vacuum-Grown Crystal Optical Grade1–3 mm & 2–4 mm vacuum-melted crystalline granulesQuote ↗
TB-EV-TI3O5Titanium Sub-Oxide (Ti3O5 & TiO2) (Ti3O5 / TiO2) Evaporation MaterialsTi3O5 / TiO212065-65-54N (99.99%) Pre-Reduced Spit-Free Optical Grade1–3 mm & 2–4 mm black sintered granules; Ø 10–20 mm vacuum-sintered tabletsQuote ↗
TB-EV-TA2O5Tantalum Pentoxide (Ta2O5) Evaporation MaterialsTa2O51314-61-04N (99.99%) / 4N5 Vacuum-Sintered1–3 mm & 2–4 mm sintered granules & tablets (white or pre-reduced dark grade)Quote ↗
TB-EV-HFO2Hafnium Dioxide (HfO2) Evaporation MaterialsHfO212055-23-14N (99.99% excl. Zr) / 4N5 Low-Zr Laser Grade1–3 mm & 1–4 mm high-density sintered granules and tabletsQuote ↗
TB-EV-ZRO2Zirconium Dioxide (ZrO2) Evaporation MaterialsZrO21314-23-44N (99.99%) Optical Grade (Pure or Y2O3/TiO2-Stabilized)1–4 mm sintered granules and tabletsQuote ↗
TB-EV-AL2O3Aluminum Oxide (Sapphire Granules) (Al2O3) Evaporation MaterialsAl2O31344-28-14N5 (99.995%) Crushed Single-Crystal Sapphire & Sintered Tablets1–3 mm & 2–5 mm crushed crystal sapphire granules; sintered e-beam tabletsQuote ↗
TB-EV-INSNIndium & Tin (In / Sn) Evaporation MaterialsIn / Sn7440-74-65N (99.999%) / 6NØ 3×3 mm & Ø 6×6 mm high-purity pellets and shotQuote ↗
TB-EV-ZNSZinc Sulfide & Zinc Selenide (ZnS / ZnSe) Evaporation MaterialsZnS / ZnSe1314-98-34N5 (99.995%) CVD Optical Grade1–4 mm CVD crystalline chunks & sintered pelletsQuote ↗
TB-EV-FLOptical Fluorides (LiF, CaF2, BaF2, YF3, LaF3) (LiF / CaF2 / BaF2 / YF3 / LaF3) Evaporation MaterialsLiF / CaF2 / BaF2 / YF3 / LaF37789-75-54N5 (99.995%) Vacuum-Grown Optical Crystal Grade1–3 mm & 2–4 mm crystalline granules (ultra-low moisture)Quote ↗
Metal Sputtering Targets (Ti / Cr / Al / Cu / Ni / W / Mo / Ta, CAS 7440-32-6) — Thin Film Materials studio photographTB-PVD-MT
Thin Film MaterialsTi / Cr / Al / Cu / Ni / W / Mo / Ta · 7440-32-6

Metal Sputtering Targets

Vacuum-melted and thermomechanically forged pure metal and custom alloy planar sputtering targets (3N5–5N) sized for research and production magnetron cathodes.

Purity / Grade3N5 (99.95%) / 4N (99.99%) / 4N5 / 5N (99.999%)
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 1–12.7 mm; Rectangular plates
Oxide & Nitride Ceramic Sputtering Targets (ITO / ZnO / Al2O3 / SiO2 / TiO2 / AlN / SiC, CAS 50926-11-9) — Thin Film Materials studio photographTB-PVD-OX
Thin Film MaterialsITO / ZnO / Al2O3 / SiO2 / TiO2 / AlN / SiC · 50926-11-9

Oxide & Nitride Ceramic Sputtering Targets

High-density hot-pressed and HIP-consolidated oxide, nitride, carbide, and sulfide ceramic sputtering targets (ITO, AZO, ZnO, Al2O3, SiO2, TiO2, BaTiO3) indium-bonded for arc-free RF/pulsed-DC PVD.

Purity / Grade99.9% (3N) / 99.99% (4N) / 99.995% (4N5)
Typical SizeØ 1", 2", 3", 4", 6" × Thickness 2–6 mm (+ Cu Backing Plate)
Evaporation Materials (Al / Cu / Ti / Cr / Ni / Ge / SiO2 / MgF2 / TiO2, CAS 7429-90-5) — Thin Film Materials studio photographTB-PVD-EV
Thin Film MaterialsAl / Cu / Ti / Cr / Ni / Ge / SiO2 / MgF2 / TiO2 · 7429-90-5

Evaporation Materials

Vacuum-degassed 4N–5N metal evaporation slugs/shots and optical dielectric granules (SiO2, Ti3O5, MgF2, Al2O3) engineered for spit-free e-beam and thermal PVD.

Purity / Grade4N (99.99%) / 4N5 / 5N (99.999%) Vacuum-Degassed
Typical Size1–3 mm & 3–6 mm granules/shots, Ø 3×3 or 6×6 mm pellets, starter sources
E-Beam Evaporation Crucible Pocket Liners (Cu / C (Graphite & Vitreous) / Mo / W / Al2O3 / BN, CAS 7440-50-8) — Thin Film Materials studio photographTB-PVD-LN
Thin Film MaterialsCu / C (Graphite & Vitreous) / Mo / W / Al2O3 / BN · 7440-50-8

E-Beam Evaporation Crucible Pocket Liners

Precision-tapered e-beam gun hearth liners in OFHC copper, purified & impermeable graphite, vitreous carbon, molybdenum, tungsten, alumina, and h-BN.

Purity / GradeOFHC Cu (99.99%), Purified Graphite/Vitreous C (<20 ppm), 99.95% Mo/W
Typical Size2 cc, 4 cc, 7 cc, 8 cc, 15 cc, 25 cc, 30 cc, 40 cc, & 100 cc
QCM Thin-Film Deposition Monitor Crystals (α-SiO2 + Au / Ag-Al Alloy Electrodes, CAS 14808-60-7) — Thin Film Materials studio photographTB-PVD-QCM
Thin Film Materialsα-SiO2 + Au / Ag-Al Alloy Electrodes · 14808-60-7

QCM Thin-Film Deposition Monitor Crystals

Precision 6.0 MHz and 5.0 MHz AT-cut plano-convex quartz crystal microbalance (QCM) thickness monitor sensors with gold or stress-relieving alloy electrodes in cleanroom dispenser packs.

Purity / GradeAT-Cut Piezoelectric Quartz (6.0 MHz & 5.0 MHz Fundamental)
Typical SizeØ 13.97 mm (0.550") Plano-Convex Standard Sensor Discs
Titanium (Ti) Sputtering Targets (Ti, CAS 7440-32-6) — Thin Film Materials studio photographTB-PVD-TI
Thin Film MaterialsTi · 7440-32-6

Titanium (Ti) Sputtering Targets

Vacuum-melted high-purity titanium (Ti, CAS 7440-32-6) planar magnetron sputtering targets in 4N (99.99%) / 4N5 (99.995%) / 5N grades for semiconductor, optical, and research PVD.

Purity / Grade4N (99.99%) / 4N5 (99.995%) / 5N
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Chromium (Cr) Sputtering Targets (Cr, CAS 7440-47-3) — Thin Film Materials studio photographTB-PVD-CR
Thin Film MaterialsCr · 7440-47-3

Chromium (Cr) Sputtering Targets

Vacuum-melted high-purity chromium (Cr, CAS 7440-47-3) planar magnetron sputtering targets in 3N5 (99.95%) / 4N (99.99%) / 4N5 grades for semiconductor, optical, and research PVD.

Purity / Grade3N5 (99.95%) / 4N (99.99%) / 4N5
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Aluminum (Al) Sputtering Targets (Al, CAS 7429-90-5) — Thin Film Materials studio photographTB-PVD-AL
Thin Film MaterialsAl · 7429-90-5

Aluminum (Al) Sputtering Targets

Vacuum-melted high-purity aluminum (Al, CAS 7429-90-5) planar magnetron sputtering targets in 4N (99.99%) / 5N (99.999%) / 5N5 grades for semiconductor, optical, and research PVD.

Purity / Grade4N (99.99%) / 5N (99.999%) / 5N5
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Copper (Cu) Sputtering Targets (Cu, CAS 7440-50-8) — Thin Film Materials studio photographTB-PVD-CU
Thin Film MaterialsCu · 7440-50-8

Copper (Cu) Sputtering Targets

Vacuum-melted high-purity copper (Cu, CAS 7440-50-8) planar magnetron sputtering targets in 4N5 (99.995%) / 5N (99.999%) / 6N OFHC grades for semiconductor, optical, and research PVD.

Purity / Grade4N5 (99.995%) / 5N (99.999%) / 6N OFHC
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Nickel (Ni) Sputtering Targets (Ni, CAS 7440-02-0) — Thin Film Materials studio photographTB-PVD-NI
Thin Film MaterialsNi · 7440-02-0

Nickel (Ni) Sputtering Targets

Vacuum-melted high-purity nickel (Ni, CAS 7440-02-0) planar magnetron sputtering targets in 4N (99.99%) / 4N5 (99.995%) / 5N grades for semiconductor, optical, and research PVD.

Purity / Grade4N (99.99%) / 4N5 (99.995%) / 5N
Typical SizeØ 1", 2", 3", 4" × 1.0–2.0 mm (thin magnetic pass-through) or 3–6 mm
Tungsten (W) Sputtering Targets (W, CAS 7440-33-7) — Thin Film Materials studio photographTB-PVD-W
Thin Film MaterialsW · 7440-33-7

Tungsten (W) Sputtering Targets

Vacuum-melted high-purity tungsten (W, CAS 7440-33-7) planar magnetron sputtering targets in 3N5 (99.95%) / 4N (99.99%) / 5N grades for semiconductor, optical, and research PVD.

Purity / Grade3N5 (99.95%) / 4N (99.99%) / 5N
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Molybdenum (Mo) Sputtering Targets (Mo, CAS 7439-98-7) — Thin Film Materials studio photographTB-PVD-MO
Thin Film MaterialsMo · 7439-98-7

Molybdenum (Mo) Sputtering Targets

Vacuum-melted high-purity molybdenum (Mo, CAS 7439-98-7) planar magnetron sputtering targets in 3N5 (99.95%) / 4N (99.99%) / 4N5 grades for semiconductor, optical, and research PVD.

Purity / Grade3N5 (99.95%) / 4N (99.99%) / 4N5
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Tantalum (Ta) Sputtering Targets (Ta, CAS 7440-25-7) — Thin Film Materials studio photographTB-PVD-TA
Thin Film MaterialsTa · 7440-25-7

Tantalum (Ta) Sputtering Targets

Vacuum-melted high-purity tantalum (Ta, CAS 7440-25-7) planar magnetron sputtering targets in 3N5 (99.95%) / 4N (99.99%) / 4N5 grades for semiconductor, optical, and research PVD.

Purity / Grade3N5 (99.95%) / 4N (99.99%) / 4N5
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Niobium (Nb) Sputtering Targets (Nb, CAS 7440-03-1) — Thin Film Materials studio photographTB-PVD-NB
Thin Film MaterialsNb · 7440-03-1

Niobium (Nb) Sputtering Targets

Vacuum-melted high-purity niobium (Nb, CAS 7440-03-1) planar magnetron sputtering targets in 3N5 (99.95%) / 4N (99.99%) / High-RRR 4N5 grades for semiconductor, optical, and research PVD.

Purity / Grade3N5 (99.95%) / 4N (99.99%) / High-RRR 4N5
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Silicon (Si) Sputtering Targets (Si, CAS 7440-21-3) — Thin Film Materials studio photographTB-PVD-SI
Thin Film MaterialsSi · 7440-21-3

Silicon (Si) Sputtering Targets

Vacuum-melted high-purity silicon (Si, CAS 7440-21-3) planar magnetron sputtering targets in 5N (99.999%) / 6N Intrinsic, B-doped (p-type), or P-doped (n-type) grades for semiconductor, optical, and research PVD.

Purity / Grade5N (99.999%) / 6N Intrinsic, B-doped (p-type), or P-doped (n-type)
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Germanium (Ge) Sputtering Targets (Ge, CAS 7440-56-4) — Thin Film Materials studio photographTB-PVD-GE
Thin Film MaterialsGe · 7440-56-4

Germanium (Ge) Sputtering Targets

Vacuum-melted high-purity germanium (Ge, CAS 7440-56-4) planar magnetron sputtering targets in 5N (99.999%) / 6N (99.9999%) Intrinsic or Ga/Sb-Doped grades for semiconductor, optical, and research PVD.

Purity / Grade5N (99.999%) / 6N (99.9999%) Intrinsic or Ga/Sb-Doped
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Vanadium (V) Sputtering Targets (V, CAS 7440-62-2) — Thin Film Materials studio photographTB-PVD-V
Thin Film MaterialsV · 7440-62-2

Vanadium (V) Sputtering Targets

Vacuum-melted high-purity vanadium (V, CAS 7440-62-2) planar magnetron sputtering targets in 3N5 (99.95%) / 4N (99.99%) grades for semiconductor, optical, and research PVD.

Purity / Grade3N5 (99.95%) / 4N (99.99%)
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Zirconium (Zr) Sputtering Targets (Zr, CAS 7440-67-7) — Thin Film Materials studio photographTB-PVD-ZR
Thin Film MaterialsZr · 7440-67-7

Zirconium (Zr) Sputtering Targets

Vacuum-melted high-purity zirconium (Zr, CAS 7440-67-7) planar magnetron sputtering targets in 3N5 (99.95% Grade 702) / 4N Low-Hf (<100 ppm Hf) grades for semiconductor, optical, and research PVD.

Purity / Grade3N5 (99.95% Grade 702) / 4N Low-Hf (<100 ppm Hf)
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Hafnium (Hf) Sputtering Targets (Hf, CAS 7440-58-6) — Thin Film Materials studio photographTB-PVD-HF
Thin Film MaterialsHf · 7440-58-6

Hafnium (Hf) Sputtering Targets

Vacuum-melted high-purity hafnium (Hf, CAS 7440-58-6) planar magnetron sputtering targets in 3N5 (99.95% excl. Zr) / 4N Low-Zr grades for semiconductor, optical, and research PVD.

Purity / Grade3N5 (99.95% excl. Zr) / 4N Low-Zr
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Cobalt (Co) Sputtering Targets (Co, CAS 7440-48-4) — Thin Film Materials studio photographTB-PVD-CO
Thin Film MaterialsCo · 7440-48-4

Cobalt (Co) Sputtering Targets

Vacuum-melted high-purity cobalt (Co, CAS 7440-48-4) planar magnetron sputtering targets in 3N5 (99.95%) / 4N (99.99%) / 4N5 grades for semiconductor, optical, and research PVD.

Purity / Grade3N5 (99.95%) / 4N (99.99%) / 4N5
Typical SizeØ 1", 2", 3", 4" × 1.0–2.0 mm (thin magnetic pass-through) or 3–6 mm
Iron (Fe) Sputtering Targets (Fe, CAS 7439-89-6) — Thin Film Materials studio photographTB-PVD-FE
Thin Film MaterialsFe · 7439-89-6

Iron (Fe) Sputtering Targets

Vacuum-melted high-purity iron (Fe, CAS 7439-89-6) planar magnetron sputtering targets in 3N5 (99.95%) / 4N (99.99%) / 4N5 grades for semiconductor, optical, and research PVD.

Purity / Grade3N5 (99.95%) / 4N (99.99%) / 4N5
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Manganese (Mn) Sputtering Targets (Mn, CAS 7439-96-5) — Thin Film Materials studio photographTB-PVD-MN
Thin Film MaterialsMn · 7439-96-5

Manganese (Mn) Sputtering Targets

Vacuum-melted high-purity manganese (Mn, CAS 7439-96-5) planar magnetron sputtering targets in 3N5 (99.95%) / 4N (99.99%) grades for semiconductor, optical, and research PVD.

Purity / Grade3N5 (99.95%) / 4N (99.99%)
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Zinc (Zn) Sputtering Targets (Zn, CAS 7440-66-6) — Thin Film Materials studio photographTB-PVD-ZN
Thin Film MaterialsZn · 7440-66-6

Zinc (Zn) Sputtering Targets

Vacuum-melted high-purity zinc (Zn, CAS 7440-66-6) planar magnetron sputtering targets in 4N (99.99%) / 4N5 (99.995%) / 5N grades for semiconductor, optical, and research PVD.

Purity / Grade4N (99.99%) / 4N5 (99.995%) / 5N
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Tin (Sn) Sputtering Targets (Sn, CAS 7440-31-5) — Thin Film Materials studio photographTB-PVD-SN
Thin Film MaterialsSn · 7440-31-5

Tin (Sn) Sputtering Targets

Vacuum-melted high-purity tin (Sn, CAS 7440-31-5) planar magnetron sputtering targets in 4N (99.99%) / 4N5 / 5N (99.999%) grades for semiconductor, optical, and research PVD.

Purity / Grade4N (99.99%) / 4N5 / 5N (99.999%)
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Indium (In) Sputtering Targets (In, CAS 7440-74-6) — Thin Film Materials studio photographTB-PVD-IN
Thin Film MaterialsIn · 7440-74-6

Indium (In) Sputtering Targets

Vacuum-melted high-purity indium (In, CAS 7440-74-6) planar magnetron sputtering targets in 4N5 (99.995%) / 5N (99.999%) / 6N grades for semiconductor, optical, and research PVD.

Purity / Grade4N5 (99.995%) / 5N (99.999%) / 6N
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Bismuth (Bi) Sputtering Targets (Bi, CAS 7440-69-9) — Thin Film Materials studio photographTB-PVD-BI
Thin Film MaterialsBi · 7440-69-9

Bismuth (Bi) Sputtering Targets

Vacuum-melted high-purity bismuth (Bi, CAS 7440-69-9) planar magnetron sputtering targets in 4N (99.99%) / 4N5 / 5N (99.999%) grades for semiconductor, optical, and research PVD.

Purity / Grade4N (99.99%) / 4N5 / 5N (99.999%)
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Antimony (Sb) Sputtering Targets (Sb, CAS 7440-36-0) — Thin Film Materials studio photographTB-PVD-SB
Thin Film MaterialsSb · 7440-36-0

Antimony (Sb) Sputtering Targets

Vacuum-melted high-purity antimony (Sb, CAS 7440-36-0) planar magnetron sputtering targets in 4N (99.99%) / 4N5 / 5N (99.999%) grades for semiconductor, optical, and research PVD.

Purity / Grade4N (99.99%) / 4N5 / 5N (99.999%)
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Tellurium (Te) Sputtering Targets (Te, CAS 13494-80-9) — Thin Film Materials studio photographTB-PVD-TE
Thin Film MaterialsTe · 13494-80-9

Tellurium (Te) Sputtering Targets

Vacuum-melted high-purity tellurium (Te, CAS 13494-80-9) planar magnetron sputtering targets in 4N (99.99%) / 4N5 / 5N (99.999%) grades for semiconductor, optical, and research PVD.

Purity / Grade4N (99.99%) / 4N5 / 5N (99.999%)
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Yttrium (Y) Sputtering Targets (Y, CAS 7440-65-5) — Thin Film Materials studio photographTB-PVD-Y
Thin Film MaterialsY · 7440-65-5

Yttrium (Y) Sputtering Targets

Vacuum-melted high-purity yttrium (Y, CAS 7440-65-5) planar magnetron sputtering targets in 3N (99.9%) / 3N5 (99.95% REM) grades for semiconductor, optical, and research PVD.

Purity / Grade3N (99.9%) / 3N5 (99.95% REM)
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Scandium (Sc) Sputtering Targets (Sc, CAS 7440-20-2) — Thin Film Materials studio photographTB-PVD-SC
Thin Film MaterialsSc · 7440-20-2

Scandium (Sc) Sputtering Targets

Vacuum-melted high-purity scandium (Sc, CAS 7440-20-2) planar magnetron sputtering targets in 3N5 (99.95%) / 4N (99.99% REM) grades for semiconductor, optical, and research PVD.

Purity / Grade3N5 (99.95%) / 4N (99.99% REM)
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Rare-Earth Metal (La, Ce, Gd, Nd, Er, Yb) (La / Ce / Gd / Nd / Er / Yb) Sputtering Targets (La / Ce / Gd / Nd / Er / Yb, CAS 7439-91-0) — Thin Film Materials studio photographTB-PVD-RE
Thin Film MaterialsLa / Ce / Gd / Nd / Er / Yb · 7439-91-0

Rare-Earth Metal (La, Ce, Gd, Nd, Er, Yb) (La / Ce / Gd / Nd / Er / Yb) Sputtering Targets

Vacuum-melted high-purity Rare-Earth metal (la, ce, gd, nd, er, yb) (La / Ce / Gd / Nd / Er / Yb, CAS 7439-91-0) planar magnetron sputtering targets in 3N (99.9%) / 3N5 (99.95%) / 4N (REM basis) grades for semiconductor, optical, and research PVD.

Purity / Grade3N (99.9%) / 3N5 (99.95%) / 4N (REM basis)
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Silver (Ag) Sputtering Targets (Ag, CAS 7440-22-4) — Thin Film Materials studio photographTB-PVD-AG
Thin Film MaterialsAg · 7440-22-4

Silver (Ag) Sputtering Targets

Vacuum-melted high-purity silver (Ag, CAS 7440-22-4) planar magnetron sputtering targets in 4N (99.99%) / 4N5 (99.995%) / 5N grades for semiconductor, optical, and research PVD.

Purity / Grade4N (99.99%) / 4N5 (99.995%) / 5N
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Titanium-Tungsten (TiW 10/90) (TiW (10:90 wt% / 30:70 at.%)) Sputtering Targets (TiW (10:90 wt% / 30:70 at.%), CAS 7440-33-7) — Thin Film Materials studio photographTB-PVD-TIW
Thin Film MaterialsTiW (10:90 wt% / 30:70 at.%) · 7440-33-7

Titanium-Tungsten (TiW 10/90) (TiW (10:90 wt% / 30:70 at.%)) Sputtering Targets

Vacuum-melted high-purity Titanium-Tungsten (TiW 10/90) (TiW (10:90 wt% / 30:70 at.%), CAS 7440-33-7) planar magnetron sputtering targets in 3N5 (99.95%) / 4N Low-Alkali Semiconductor Grade grades for semiconductor, optical, and research PVD.

Purity / Grade3N5 (99.95%) / 4N Low-Alkali Semiconductor Grade
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Nickel-Chromium (NiCr 80/20) (NiCr (80:20 / 60:40 / 50:50 wt%)) Sputtering Targets (NiCr (80:20 / 60:40 / 50:50 wt%), CAS 11106-97-1) — Thin Film Materials studio photographTB-PVD-NICR
Thin Film MaterialsNiCr (80:20 / 60:40 / 50:50 wt%) · 11106-97-1

Nickel-Chromium (NiCr 80/20) (NiCr (80:20 / 60:40 / 50:50 wt%)) Sputtering Targets

Vacuum-melted high-purity Nickel-Chromium (NiCr 80/20) (NiCr (80:20 / 60:40 / 50:50 wt%), CAS 11106-97-1) planar magnetron sputtering targets in 3N5 (99.95%) / 4N grades for semiconductor, optical, and research PVD.

Purity / Grade3N5 (99.95%) / 4N
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Permalloy (Ni80Fe20 & CoFeB) (Ni80Fe20 / Ni81Fe19 / Co40Fe40B20) Sputtering Targets (Ni80Fe20 / Ni81Fe19 / Co40Fe40B20, CAS 12168-54-6) — Thin Film Materials studio photographTB-PVD-NIFE
Thin Film MaterialsNi80Fe20 / Ni81Fe19 / Co40Fe40B20 · 12168-54-6

Permalloy (Ni80Fe20 & CoFeB) (Ni80Fe20 / Ni81Fe19 / Co40Fe40B20) Sputtering Targets

Vacuum-melted high-purity permalloy (Ni80Fe20 & CoFeB) (Ni80Fe20 / Ni81Fe19 / Co40Fe40B20, CAS 12168-54-6) planar magnetron sputtering targets in 3N5 (99.95%) / 4N Vacuum-Induction Melted grades for semiconductor, optical, and research PVD.

Purity / Grade3N5 (99.95%) / 4N Vacuum-Induction Melted
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Aluminum-Scandium (AlSc Alloy) (Al1-xScx (Sc 5–43 at.%)) Sputtering Targets (Al1-xScx (Sc 5–43 at.%), CAS 60683-64-9) — Thin Film Materials studio photographTB-PVD-ALSC
Thin Film MaterialsAl1-xScx (Sc 5–43 at.%) · 60683-64-9

Aluminum-Scandium (AlSc Alloy) (Al1-xScx (Sc 5–43 at.%)) Sputtering Targets

Vacuum-melted high-purity Aluminum-Scandium (AlSc alloy) (Al1-xScx (Sc 5–43 at.%), CAS 60683-64-9) planar magnetron sputtering targets in 4N (99.99%) Vacuum-Melted / HIP Intermetallic grades for semiconductor, optical, and research PVD.

Purity / Grade4N (99.99%) Vacuum-Melted / HIP Intermetallic
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Copper-Gallium & CIGS Alloy (CuGa (70:30 / 75:25) & CuInGaSe2) Sputtering Targets (CuGa (70:30 / 75:25) & CuInGaSe2, CAS 57606-41-4) — Thin Film Materials studio photographTB-PVD-CIGS
Thin Film MaterialsCuGa (70:30 / 75:25) & CuInGaSe2 · 57606-41-4

Copper-Gallium & CIGS Alloy (CuGa (70:30 / 75:25) & CuInGaSe2) Sputtering Targets

Vacuum-melted high-purity Copper-Gallium & CIGS alloy (CuGa (70:30 / 75:25) & CuInGaSe2, CAS 57606-41-4) planar magnetron sputtering targets in 4N (99.99%) / 4N5 grades for semiconductor, optical, and research PVD.

Purity / Grade4N (99.99%) / 4N5
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
Indium Tin Oxide (In2O3:SnO2 (90:10 wt%)) Sputtering Targets (In2O3:SnO2 (90:10 wt%), CAS 50926-11-9) — Thin Film Materials studio photographTB-PVD-ITO
Thin Film MaterialsIn2O3:SnO2 (90:10 wt%) · 50926-11-9

Indium Tin Oxide (In2O3:SnO2 (90:10 wt%)) Sputtering Targets

High-density hot-pressed indium tin oxide (In2O3:SnO2 (90:10 wt%), CAS 50926-11-9) ceramic sputtering targets in 4N (99.99%) · ≥99.5% Relative Density purity, indium-bonded for arc-free RF and pulsed-DC thin-film deposition.

Purity / Grade4N (99.99%) · ≥99.5% Relative Density
Typical SizeØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)
Zinc Oxide (ZnO) Sputtering Targets (ZnO, CAS 1314-13-2) — Thin Film Materials studio photographTB-PVD-ZNO
Thin Film MaterialsZnO · 1314-13-2

Zinc Oxide (ZnO) Sputtering Targets

High-density hot-pressed zinc oxide (ZnO, CAS 1314-13-2) ceramic sputtering targets in 4N (99.99%) / 4N5 / 5N purity, indium-bonded for arc-free RF and pulsed-DC thin-film deposition.

Purity / Grade4N (99.99%) / 4N5 / 5N
Typical SizeØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)
Tin Dioxide & Antimony/Fluorine Doped (SnO2 / ATO (SnO2:Sb2O3)) Sputtering Targets (SnO2 / ATO (SnO2:Sb2O3), CAS 18282-10-5) — Thin Film Materials studio photographTB-PVD-SNO2
Thin Film MaterialsSnO2 / ATO (SnO2:Sb2O3) · 18282-10-5

Tin Dioxide & Antimony/Fluorine Doped (SnO2 / ATO (SnO2:Sb2O3)) Sputtering Targets

High-density hot-pressed tin dioxide & Antimony/Fluorine doped (SnO2 / ATO (SnO2:Sb2O3), CAS 18282-10-5) ceramic sputtering targets in 4N (99.99%) purity, indium-bonded for arc-free RF and pulsed-DC thin-film deposition.

Purity / Grade4N (99.99%)
Typical SizeØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)
Indium Gallium Zinc Oxide (IGZO) (InGaZnO4 (In:Ga:Zn = 1:1:1 at.%)) Sputtering Targets (InGaZnO4 (In:Ga:Zn = 1:1:1 at.%), CAS Composition dependent; confirm supplier SDS) — Thin Film Materials studio photographTB-PVD-IGZO
Thin Film MaterialsInGaZnO4 (In:Ga:Zn = 1:1:1 at.%) · Composition dependent; confirm supplier SDS

Indium Gallium Zinc Oxide (IGZO) (InGaZnO4 (In:Ga:Zn = 1:1:1 at.%)) Sputtering Targets

High-density hot-pressed indium gallium zinc oxide (IGZO) (InGaZnO4 (In:Ga:Zn = 1:1:1 at.%), CAS Composition dependent; confirm supplier SDS) ceramic sputtering targets in 4N (99.99%) · High-Density Conductive Ceramic purity, indium-bonded for arc-free RF and pulsed-DC thin-film deposition.

Purity / Grade4N (99.99%) · High-Density Conductive Ceramic
Typical SizeØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)
Barium Titanate & Barium Strontium Titanate (BaTiO3 / Ba1-xSrxTiO3 (BST)) Sputtering Targets (BaTiO3 / Ba1-xSrxTiO3 (BST), CAS 12047-27-7) — Thin Film Materials studio photographTB-PVD-BST
Thin Film MaterialsBaTiO3 / Ba1-xSrxTiO3 (BST) · 12047-27-7

Barium Titanate & Barium Strontium Titanate (BaTiO3 / Ba1-xSrxTiO3 (BST)) Sputtering Targets

High-density hot-pressed barium titanate & barium strontium titanate (BaTiO3 / Ba1-xSrxTiO3 (BST), CAS 12047-27-7) ceramic sputtering targets in 3N5 (99.95%) / 4N purity, indium-bonded for arc-free RF and pulsed-DC thin-film deposition.

Purity / Grade3N5 (99.95%) / 4N
Typical SizeØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)
Lead Zirconate Titanate (PZT 52/48) (Pb(Zr0.52Ti0.48)O3 (+10–20 mol% excess PbO)) Sputtering Targets (Pb(Zr0.52Ti0.48)O3 (+10–20 mol% excess PbO), CAS 12626-81-2) — Thin Film Materials studio photographTB-PVD-PZT
Thin Film MaterialsPb(Zr0.52Ti0.48)O3 (+10–20 mol% excess PbO) · 12626-81-2

Lead Zirconate Titanate (PZT 52/48) (Pb(Zr0.52Ti0.48)O3 (+10–20 mol% excess PbO)) Sputtering Targets

High-density hot-pressed lead zirconate titanate (PZT 52/48) (Pb(Zr0.52Ti0.48)O3 (+10–20 mol% excess PbO), CAS 12626-81-2) ceramic sputtering targets in 3N5 (99.95%) purity, indium-bonded for arc-free RF and pulsed-DC thin-film deposition.

Purity / Grade3N5 (99.95%)
Typical SizeØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)
Solid-State Battery Targets (LiCoO2, Li3PO4, LLZO) (LiCoO2 / Li3PO4 / LiMn2O4 / Li4Ti5O12 / LLZO) Sputtering Targets (LiCoO2 / Li3PO4 / LiMn2O4 / Li4Ti5O12 / LLZO, CAS 12190-79-3) — Thin Film Materials studio photographTB-PVD-LIB
Thin Film MaterialsLiCoO2 / Li3PO4 / LiMn2O4 / Li4Ti5O12 / LLZO · 12190-79-3

Solid-State Battery Targets (LiCoO2, Li3PO4, LLZO) (LiCoO2 / Li3PO4 / LiMn2O4 / Li4Ti5O12 / LLZO) Sputtering Targets

High-density hot-pressed Solid-State battery targets (LiCoO2, Li3PO4, LLZO) (LiCoO2 / Li3PO4 / LiMn2O4 / Li4Ti5O12 / LLZO, CAS 12190-79-3) ceramic sputtering targets in 3N5 (99.95%) / 4N (with optional 10–15% Li excess) purity, indium-bonded for arc-free RF and pulsed-DC thin-film deposition.

Purity / Grade3N5 (99.95%) / 4N (with optional 10–15% Li excess)
Typical SizeØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)
2D Transition-Metal Dichalcogenides (MoS2, WS2, MoSe2, WSe2) (MoS2 / WS2 / MoSe2 / WSe2) Sputtering Targets (MoS2 / WS2 / MoSe2 / WSe2, CAS 1317-33-5) — Thin Film Materials studio photographTB-PVD-TMD
Thin Film MaterialsMoS2 / WS2 / MoSe2 / WSe2 · 1317-33-5

2D Transition-Metal Dichalcogenides (MoS2, WS2, MoSe2, WSe2) (MoS2 / WS2 / MoSe2 / WSe2) Sputtering Targets

High-density hot-pressed 2D Transition-Metal dichalcogenides (MoS2, WS2, MoSe2, WSe2) (MoS2 / WS2 / MoSe2 / WSe2, CAS 1317-33-5) ceramic sputtering targets in 4N (99.99%) purity, indium-bonded for arc-free RF and pulsed-DC thin-film deposition.

Purity / Grade4N (99.99%)
Typical SizeØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)
Zinc Sulfide & Zinc Selenide (ZnS, ZnSe) (ZnS / ZnSe) Sputtering Targets (ZnS / ZnSe, CAS 1314-98-3) — Thin Film Materials studio photographTB-PVD-ZNS
Thin Film MaterialsZnS / ZnSe · 1314-98-3

Zinc Sulfide & Zinc Selenide (ZnS, ZnSe) (ZnS / ZnSe) Sputtering Targets

High-density hot-pressed zinc sulfide & zinc selenide (ZnS, ZnSe) (ZnS / ZnSe, CAS 1314-98-3) ceramic sputtering targets in 4N5 (99.995%) / 5N CVD Optical Grade purity, indium-bonded for arc-free RF and pulsed-DC thin-film deposition.

Purity / Grade4N5 (99.995%) / 5N CVD Optical Grade
Typical SizeØ 1", 2", 3", 4", 6" × Thickness 2–6.35 mm (+ OFHC Cu Backing Plate)
Titanium (Ti) Evaporation Materials (Ti, CAS 7440-32-6) — Thin Film Materials studio photographTB-EV-TI
Thin Film MaterialsTi · 7440-32-6

Titanium (Ti) Evaporation Materials

Vacuum-degassed 4N5 (99.995%) / 5N (99.999%) titanium (Ti, CAS 7440-32-6) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.

Purity / Grade4N5 (99.995%) / 5N (99.999%)
Typical SizeØ 3×3 mm & Ø 6×6 mm vacuum-degassed slugs; pre-melted hearth starter cones
Chromium (Cr) Evaporation Materials (Cr, CAS 7440-47-3) — Thin Film Materials studio photographTB-EV-CR
Thin Film MaterialsCr · 7440-47-3

Chromium (Cr) Evaporation Materials

Vacuum-degassed 4N (99.99%) / 4N5 (99.995%) chromium (Cr, CAS 7440-47-3) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.

Purity / Grade4N (99.99%) / 4N5 (99.995%)
Typical Size1–3 mm & 2–5 mm degassed chunks/granules; Cr-plated W evaporation rods
Copper (Cu) Evaporation Materials (Cu, CAS 7440-50-8) — Thin Film Materials studio photographTB-EV-CU
Thin Film MaterialsCu · 7440-50-8

Copper (Cu) Evaporation Materials

Vacuum-degassed 5N (99.999%) / 6N OFHC copper (Cu, CAS 7440-50-8) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.

Purity / Grade5N (99.999%) / 6N OFHC
Typical SizeØ 3×3 mm & Ø 6×6 mm oxygen-free cylindrical slugs; 2–5 mm shot
Nickel (Ni) Evaporation Materials (Ni, CAS 7440-02-0) — Thin Film Materials studio photographTB-EV-NI
Thin Film MaterialsNi · 7440-02-0

Nickel (Ni) Evaporation Materials

Vacuum-degassed 4N5 (99.995%) / 5N (99.999%) nickel (Ni, CAS 7440-02-0) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.

Purity / Grade4N5 (99.995%) / 5N (99.999%)
Typical SizeØ 3×3 mm & Ø 6×6 mm vacuum-degassed slugs
Silver (Ag) Evaporation Materials (Ag, CAS 7440-22-4) — Thin Film Materials studio photographTB-EV-AG
Thin Film MaterialsAg · 7440-22-4

Silver (Ag) Evaporation Materials

Vacuum-degassed 4N5 (99.995%) / 5N (99.999%) silver (Ag, CAS 7440-22-4) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.

Purity / Grade4N5 (99.995%) / 5N (99.999%)
Typical SizeØ 3×3 mm & Ø 6×6 mm slugs; 1–3 mm vacuum-melted shot
Germanium (Ge) Evaporation Materials (Ge, CAS 7440-56-4) — Thin Film Materials studio photographTB-EV-GE
Thin Film MaterialsGe · 7440-56-4

Germanium (Ge) Evaporation Materials

Vacuum-degassed 5N (99.999%) / 6N Zone-Refined germanium (Ge, CAS 7440-56-4) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.

Purity / Grade5N (99.999%) / 6N Zone-Refined
Typical Size1–4 mm & 3–6 mm crystalline pieces; pre-melted hearth slugs
Magnesium Fluoride (MgF2) Evaporation Materials (MgF2, CAS 7783-40-6) — Thin Film Materials studio photographTB-EV-MGF2
Thin Film MaterialsMgF2 · 7783-40-6

Magnesium Fluoride (MgF2) Evaporation Materials

Vacuum-degassed 4N5 (99.995%) Vacuum-Grown Crystal Optical Grade magnesium fluoride (MgF2, CAS 7783-40-6) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.

Purity / Grade4N5 (99.995%) Vacuum-Grown Crystal Optical Grade
Typical Size1–3 mm & 2–4 mm vacuum-melted crystalline granules
Titanium Sub-Oxide (Ti3O5 & TiO2) (Ti3O5 / TiO2) Evaporation Materials (Ti3O5 / TiO2, CAS 12065-65-5) — Thin Film Materials studio photographTB-EV-TI3O5
Thin Film MaterialsTi3O5 / TiO2 · 12065-65-5

Titanium Sub-Oxide (Ti3O5 & TiO2) (Ti3O5 / TiO2) Evaporation Materials

Vacuum-degassed 4N (99.99%) Pre-Reduced Spit-Free Optical Grade titanium Sub-Oxide (Ti3O5 & TiO2) (Ti3O5 / TiO2, CAS 12065-65-5) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.

Purity / Grade4N (99.99%) Pre-Reduced Spit-Free Optical Grade
Typical Size1–3 mm & 2–4 mm black sintered granules; Ø 10–20 mm vacuum-sintered tablets
Hafnium Dioxide (HfO2) Evaporation Materials (HfO2, CAS 12055-23-1) — Thin Film Materials studio photographTB-EV-HFO2
Thin Film MaterialsHfO2 · 12055-23-1

Hafnium Dioxide (HfO2) Evaporation Materials

Vacuum-degassed 4N (99.99% excl. Zr) / 4N5 Low-Zr Laser Grade hafnium dioxide (HfO2, CAS 12055-23-1) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.

Purity / Grade4N (99.99% excl. Zr) / 4N5 Low-Zr Laser Grade
Typical Size1–3 mm & 1–4 mm high-density sintered granules and tablets
Zirconium Dioxide (ZrO2) Evaporation Materials (ZrO2, CAS 1314-23-4) — Thin Film Materials studio photographTB-EV-ZRO2
Thin Film MaterialsZrO2 · 1314-23-4

Zirconium Dioxide (ZrO2) Evaporation Materials

Vacuum-degassed 4N (99.99%) Optical Grade (Pure or Y2O3/TiO2-Stabilized) zirconium dioxide (ZrO2, CAS 1314-23-4) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.

Purity / Grade4N (99.99%) Optical Grade (Pure or Y2O3/TiO2-Stabilized)
Typical Size1–4 mm sintered granules and tablets
Aluminum Oxide (Sapphire Granules) (Al2O3) Evaporation Materials (Al2O3, CAS 1344-28-1) — Thin Film Materials studio photographTB-EV-AL2O3
Thin Film MaterialsAl2O3 · 1344-28-1

Aluminum Oxide (Sapphire Granules) (Al2O3) Evaporation Materials

Vacuum-degassed 4N5 (99.995%) Crushed Single-Crystal Sapphire & Sintered Tablets aluminum oxide (sapphire granules) (Al2O3, CAS 1344-28-1) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.

Purity / Grade4N5 (99.995%) Crushed Single-Crystal Sapphire & Sintered Tablets
Typical Size1–3 mm & 2–5 mm crushed crystal sapphire granules; sintered e-beam tablets
Optical Fluorides (LiF, CaF2, BaF2, YF3, LaF3) (LiF / CaF2 / BaF2 / YF3 / LaF3) Evaporation Materials (LiF / CaF2 / BaF2 / YF3 / LaF3, CAS 7789-75-5) — Thin Film Materials studio photographTB-EV-FL
Thin Film MaterialsLiF / CaF2 / BaF2 / YF3 / LaF3 · 7789-75-5

Optical Fluorides (LiF, CaF2, BaF2, YF3, LaF3) (LiF / CaF2 / BaF2 / YF3 / LaF3) Evaporation Materials

Vacuum-degassed 4N5 (99.995%) Vacuum-Grown Optical Crystal Grade optical fluorides (LiF, CaF2, BaF2, YF3, LaF3) (LiF / CaF2 / BaF2 / YF3 / LaF3, CAS 7789-75-5) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.

Purity / Grade4N5 (99.995%) Vacuum-Grown Optical Crystal Grade
Typical Size1–3 mm & 2–4 mm crystalline granules (ultra-low moisture)
Custom & catalog specifications

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