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Thin Film Materials · TB-EV-TI

Titanium (Ti) Evaporation Materials

Vacuum-degassed 4N5 (99.995%) / 5N (99.999%) titanium (Ti, CAS 7440-32-6) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.

Alternate & search designations: Titanium e-beam evaporation pellets, 4N5 (99.995%) / 5N (99.999%) Ti vacuum deposition granules & shot, PVD starter source Ti
Purity / Grade Options4N5 (99.995%) / 5N (99.999%)
Standard DimensionsØ 3×3 mm & Ø 6×6 mm vacuum-degassed slugs; pre-melted hearth starter cones
Available Configurations50 g, 100 g, 250 g, 500 g, & 1 kg vacuum-degassed sealed lots
Ordering & MOQSpecification-based quote · Prototype & production lots

Material & Engineering Overview

Prepared specifically for high-vacuum electron-beam and resistive thermal evaporation, our 4N5 (99.995%) / 5N (99.999%) titanium (Ti, CAS 7440-32-6) deposition materials undergo vacuum degassing or high-temperature sintering to eliminate trapped volatiles and micro-voids that cause melt spitting and pinhole film defects.

Evaporate directly from water-cooled Cu e-beam hearths or Fabmate/impermeable-graphite/vitreous-carbon pocket liners, or from tungsten boats for thin adhesion layers. Supplied in cleanroom argon-flushed containers by weight (50 g to 1,000 g lots) or piece count, accompanied by the manufacturer's batch trace-impurity Certificate of Analysis.

Standard Shipment Documentation: Manufacturer Lot COA (ICP-OES / GDMS trace metal ppm breakdown for Ti) and net-weight sealed lot label.

Primary Research & Industrial Applications

  • Universal 2–20 nm adhesion promotion layer beneath Au, Pt, Pd, Ag, and Cu on SiO2/sapphire
  • Titanium sublimation pump (TSP) getter charges for UHV chambers
  • Ti/Au and Ti/Al/Ni/Au ohmic contacts on III-V and GaN wafers
  • Optical TiO2 reactive ion-assisted e-beam evaporation

Nominal Material Reference Properties

Property / MetricNominal Reference Value (Grade Dependent)
Formula & CAS #Ti (CAS 7440-32-6)
Purity Tiers4N5 (99.995%) / 5N (99.999%)
Density & Melting/Sublimation4.51 g/cm³ · MP/Subl. ~1,668 °C
Standard FormsØ 3×3 mm & Ø 6×6 mm vacuum-degassed slugs; pre-melted hearth starter cones
Recommended Liner / BoatEvaporate directly from water-cooled Cu e-beam hearths or Fabmate/impermeable-graphite/vitreous-carbon pocket liners, or from tungsten boats for thin adhesion layers

Reference values reflect typical sintered, fused, or wrought grades. Exact batch test figures are confirmed on your written quotation and accompanying lot Certificate of Analysis.

What to Specify in Your Quote Request

Specify Ti purity (4N5 (99.995%) / 5N (99.999%)), preferred pellet or granule size (Ø 3×3 mm & Ø 6×6 mm vacuum-degassed slugs; pre-melted hearth starter cones), deposition method (e-beam hearth pocket cc volume vs. resistive W/Mo/Ta boat), and pack weight in grams.

Include target quantity, destination country/postal code for express air freight calculation, and any special cleanroom bagging or certification requests.

Prepare Titanium (Ti) Evaporation Materials RFQ ↗

Technical & Procurement FAQ

Which crucible liner or boat is recommended for evaporating titanium (Ti)?
Evaporate directly from water-cooled Cu e-beam hearths or Fabmate/impermeable-graphite/vitreous-carbon pocket liners, or from tungsten boats for thin adhesion layers.
How should Ti evaporation granules/pellets be pre-conditioned in the chamber?
Sweep a low-power defocused e-beam or low resistive boat current across the charge behind a closed shutter until chamber base pressure recovers before ramping to deposition rate.
What lot sizes are available for TB-EV-TI?
Standard research packs are quoted in 50 g, 100 g, 250 g, 500 g, and 1 kg sealed containers with full batch COA.
Cross-referenced catalog

Related technical materials.

Complementary furnaceware, substrates, PVD consumables, and refractory hardware frequently ordered together.

Evaporation Materials (Al / Cu / Ti / Cr / Ni / Ge / SiO2 / MgF2 / TiO2, CAS 7429-90-5) — Thin Film Materials studio photographTB-PVD-EV
Thin Film MaterialsAl / Cu / Ti / Cr / Ni / Ge / SiO2 / MgF2 / TiO2 · 7429-90-5

Evaporation Materials

Vacuum-degassed 4N–5N metal evaporation slugs/shots and optical dielectric granules (SiO2, Ti3O5, MgF2, Al2O3) engineered for spit-free e-beam and thermal PVD.

Purity / Grade4N (99.99%) / 4N5 / 5N (99.999%) Vacuum-Degassed
Typical Size1–3 mm & 3–6 mm granules/shots, Ø 3×3 or 6×6 mm pellets, starter sources
Titanium (Ti) Sputtering Targets (Ti, CAS 7440-32-6) — Thin Film Materials studio photographTB-PVD-TI
Thin Film MaterialsTi · 7440-32-6

Titanium (Ti) Sputtering Targets

Vacuum-melted high-purity titanium (Ti, CAS 7440-32-6) planar magnetron sputtering targets in 4N (99.99%) / 4N5 (99.995%) / 5N grades for semiconductor, optical, and research PVD.

Purity / Grade4N (99.99%) / 4N5 (99.995%) / 5N
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 2–12.7 mm; Rectangular
E-Beam Evaporation Crucible Pocket Liners (Cu / C (Graphite & Vitreous) / Mo / W / Al2O3 / BN, CAS 7440-50-8) — Thin Film Materials studio photographTB-PVD-LN
Thin Film MaterialsCu / C (Graphite & Vitreous) / Mo / W / Al2O3 / BN · 7440-50-8

E-Beam Evaporation Crucible Pocket Liners

Precision-tapered e-beam gun hearth liners in OFHC copper, purified & impermeable graphite, vitreous carbon, molybdenum, tungsten, alumina, and h-BN.

Purity / GradeOFHC Cu (99.99%), Purified Graphite/Vitreous C (<20 ppm), 99.95% Mo/W
Typical Size2 cc, 4 cc, 7 cc, 8 cc, 15 cc, 25 cc, 30 cc, 40 cc, & 100 cc
QCM Thin-Film Deposition Monitor Crystals (α-SiO2 + Au / Ag-Al Alloy Electrodes, CAS 14808-60-7) — Thin Film Materials studio photographTB-PVD-QCM
Thin Film Materialsα-SiO2 + Au / Ag-Al Alloy Electrodes · 14808-60-7

QCM Thin-Film Deposition Monitor Crystals

Precision 6.0 MHz and 5.0 MHz AT-cut plano-convex quartz crystal microbalance (QCM) thickness monitor sensors with gold or stress-relieving alloy electrodes in cleanroom dispenser packs.

Purity / GradeAT-Cut Piezoelectric Quartz (6.0 MHz & 5.0 MHz Fundamental)
Typical SizeØ 13.97 mm (0.550") Plano-Convex Standard Sensor Discs
Custom & catalog specifications

Need pricing, lead time, or custom dimensions?

Submit your purity grade, geometry, quantity, and documentation requirements. Every order includes the producing mill's batch Certificate of Analysis (COA) and pre-shipment dimensional verification.

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