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Thin Film Materials · TB-PVD-LN

E-Beam Evaporation Crucible Pocket Liners

Precision-tapered e-beam gun hearth liners in OFHC copper, purified & impermeable graphite, vitreous carbon, molybdenum, tungsten, alumina, and h-BN.

Alternate & search designations: Electron-beam gun hearth liner cup, vitreous carbon cone liner, OFHC copper pocket crucible, Fabmate-equivalent impermeable graphite liner
Purity / Grade OptionsOFHC Cu (99.99%), Purified Graphite/Vitreous C (<20 ppm), 99.95% Mo/W
Standard Dimensions2 cc, 4 cc, 7 cc, 8 cc, 15 cc, 25 cc, 30 cc, 40 cc, & 100 cc
Available ConfigurationsStandard 15° tapered wall pockets compatible with Telemark, Temescal, Ferrotec, Inficon, Jeol
Ordering & MOQSpecification-based quote · Prototype & production lots

Material & Engineering Overview

Electron-beam crucible liners act as a calibrated thermal barrier between your molten evaporant and the water-cooled copper hearth—dramatically boosting deposition rate at lower e-beam filament power while preventing cross-contamination across multi-pocket turrets. Machined to standard 15° side-wall tapers (2 cc mini-guns through 40 cc and 100 cc production pockets), our liners drop directly into Telemark, Temescal, Ferrotec, Leybold, Ulvac, and Angstrom e-beam sources.

Choose OFHC copper for high-thermal-transfer metals/oxides, high-strength impermeable graphite or glassy vitreous carbon for gold/aluminum/metals, molybdenum or tungsten for refractory/oxide melts, or alumina/h-BN ceramic inserts.

Standard Shipment Documentation: Manufacturer Material Lot COA and critical top-OD / bottom-OD / height / taper angle dimensional check.

Primary Research & Industrial Applications

  • Multi-pocket electron-beam evaporator hearth protection & quick material changeover
  • Thermal-barrier rate enhancement for high-melting metals and dielectrics
  • Preventing molten Al, Au, Ag, Pt, or Ni from wetting or eroding gun hearths
  • Cleanroom semiconductor lift-off and optical box-coater production runs

Nominal Material Reference Properties

Property / MetricNominal Reference Value (Grade Dependent)
Standard Pocket Volumes2, 4, 6, 7, 8, 12, 15, 25, 30, 40, and 100 cc
Taper & FitPrecision CNC turned (15° standard wall taper or custom print)
Carbon GradesPurified fine-grain graphite, Impermeable PyC-sealed graphite, Solid Vitreous Carbon
Metal/Ceramic GradesOFHC Cu (C10100), 99.95% Mo, 99.95% W, 99.8% Al2O3, Pure h-BN
CleanlinessSolvent/DI cleaned & cleanroom sealed

Reference values reflect typical sintered, fused, or wrought grades. Exact batch test figures are confirmed on your written quotation and accompanying lot Certificate of Analysis.

What to Specify in Your Quote Request

Specify e-beam gun brand/model OR exact pocket top OD × bottom OD × overall height × wall thickness (critical: keep ~0.5 mm clearance or match gun spec—graphite/ceramic thermal liners are deliberately slightly undersized so they thermally isolate from the water-cooled hearth!), liner material, evaporant metal/oxide, and pack quantity.

Include target quantity, destination country/postal code for express air freight calculation, and any special cleanroom bagging or certification requests.

Prepare E-Beam Evaporation Crucible Pocket Liners RFQ ↗

Technical & Procurement FAQ

Should a graphite or molybdenum e-beam liner sit tight or slightly loose in the copper hearth?
Thermal-barrier liners (graphite, vitreous carbon, Mo, W, Al2O3) are intentionally machined with a small radial air/vacuum gap so they do not dump all e-beam heat into the water-cooled hearth; conversely, OFHC copper liners match the hearth taper snugly to maximize cooling.
Which liner material prevents molten aluminum from creeping up the pocket wall?
Impermeable pyrolytic-sealed graphite, vitreous carbon, or composite BN/TiB2 liners are widely used for aluminum, paired with keeping fill volume below 60% and sweeping the e-beam inside the pocket rim.
What pack sizes are available for e-beam liners?
Liners can be quoted individually for tungsten/vitreous carbon or in economical packs of 5, 10, or 25 pieces for copper and graphite consumables.
Cross-referenced catalog

Related technical materials.

Complementary furnaceware, substrates, PVD consumables, and refractory hardware frequently ordered together.

Evaporation Materials (Al / Cu / Ti / Cr / Ni / Ge / SiO2 / MgF2 / TiO2, CAS 7429-90-5) — Thin Film Materials studio photographTB-PVD-EV
Thin Film MaterialsAl / Cu / Ti / Cr / Ni / Ge / SiO2 / MgF2 / TiO2 · 7429-90-5

Evaporation Materials

Vacuum-degassed 4N–5N metal evaporation slugs/shots and optical dielectric granules (SiO2, Ti3O5, MgF2, Al2O3) engineered for spit-free e-beam and thermal PVD.

Purity / Grade4N (99.99%) / 4N5 / 5N (99.999%) Vacuum-Degassed
Typical Size1–3 mm & 3–6 mm granules/shots, Ø 3×3 or 6×6 mm pellets, starter sources
QCM Thin-Film Deposition Monitor Crystals (α-SiO2 + Au / Ag-Al Alloy Electrodes, CAS 14808-60-7) — Thin Film Materials studio photographTB-PVD-QCM
Thin Film Materialsα-SiO2 + Au / Ag-Al Alloy Electrodes · 14808-60-7

QCM Thin-Film Deposition Monitor Crystals

Precision 6.0 MHz and 5.0 MHz AT-cut plano-convex quartz crystal microbalance (QCM) thickness monitor sensors with gold or stress-relieving alloy electrodes in cleanroom dispenser packs.

Purity / GradeAT-Cut Piezoelectric Quartz (6.0 MHz & 5.0 MHz Fundamental)
Typical SizeØ 13.97 mm (0.550") Plano-Convex Standard Sensor Discs
Pyrolytic Graphite & Glassy (Vitreous) Carbon (C, CAS 7440-44-0) — Graphite Components studio photographTB-PG-GC
Graphite ComponentsC · 7440-44-0

Pyrolytic Graphite & Glassy (Vitreous) Carbon

Ultra-pure 5N CVD pyrolytic graphite (anisotropic thermal/diamagnetic plates) and mirror-polished gas-impermeable glassy (vitreous) carbon electrodes, wafers, and crucibles.

Purity / Grade≥99.999% (5N CVD Pyrolytic Graphite & Polymeric Glassy Carbon)
Typical SizePG plates 0.5–12 mm; Glassy carbon rods, plates, wafers, & crucibles
Custom & catalog specifications

Need pricing, lead time, or custom dimensions?

Submit your purity grade, geometry, quantity, and documentation requirements. Every order includes the producing mill's batch Certificate of Analysis (COA) and pre-shipment dimensional verification.

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