Precision 6.0 MHz and 5.0 MHz AT-cut plano-convex quartz crystal microbalance (QCM) thickness monitor sensors with gold or stress-relieving alloy electrodes in cleanroom dispenser packs.
Every PVD sputtering, e-beam, thermal, and ALD tool relies on AT-cut piezoelectric quartz monitor crystals to track sub-angstrom deposition rates and film thickness in real time. Precision contoured and lapped from inclusion-free cultured quartz and metallized with adherent Cr/Au or stress-tolerant Ag-Al alloy keyhole/full-pad electrodes, our Ø 14 mm (0.550") crystals fit standard Inficon, Maxtek, Colnatec, Sycon, Intellemetrics, and Ulvac sensor heads.
Supplied in dust-free 10-crystal cleanroom carousel/dispenser packs with 100% resonant-frequency and series-resistance lot testing.
| Property / Metric | Nominal Reference Value (Grade Dependent) |
|---|---|
| Resonant Frequencies | 6.00 MHz (Inficon/Sycon standard) & 5.00 MHz (Maxtek/Ulvac standard) |
| Crystal Cut & Geometry | AT-cut (or high-temp RC-cut), Ø 13.97 mm (0.550") plano-convex |
| Electrode Options | Gold (Au over Cr/Ti adhesion) or Silver/Aluminum Alloy |
| Frequency Tolerance | 5.980–5.995 MHz nominal start (100% tested for clean mode lock) |
| Packaging | 10 crystals per cleanroom carousel pack (sold in boxes of 1, 5, or 10 packs) |
Reference values reflect typical sintered, fused, or wrought grades. Exact batch test figures are confirmed on your written quotation and accompanying lot Certificate of Analysis.
Confirm your thickness monitor brand/frequency (6.0 MHz vs. 5.0 MHz!), electrode metal (Gold for general metals/organics vs. Alloy for high-stress oxides like SiO2, Al2O3, MgF2, Ti, Cr, W), and number of 10-piece packs.
Include target quantity, destination country/postal code for express air freight calculation, and any special cleanroom bagging or certification requests.
Prepare QCM Thin-Film Deposition Monitor Crystals RFQ ↗Complementary furnaceware, substrates, PVD consumables, and refractory hardware frequently ordered together.
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TB-PVD-BT99.95% pure tungsten, molybdenum, and tantalum resistive thermal evaporation boats, baffled box sources, and stranded tungsten wire baskets/coils.
TB-PVD-MTVacuum-melted and thermomechanically forged pure metal and custom alloy planar sputtering targets (3N5–5N) sized for research and production magnetron cathodes.
Submit your purity grade, geometry, quantity, and documentation requirements. Every order includes the producing mill's batch Certificate of Analysis (COA) and pre-shipment dimensional verification.