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Thin Film Materials · TB-PVD-EV

Evaporation Materials

Vacuum-degassed 4N–5N metal evaporation slugs/shots and optical dielectric granules (SiO2, Ti3O5, MgF2, Al2O3) engineered for spit-free e-beam and thermal PVD.

Alternate & search designations: E-beam evaporation starter pellets, thermal evaporation metal slugs & wire clips, optical coating MgF2/SiO2/Ti3O5 granules, 5N vacuum deposition shot
Purity / Grade Options4N (99.99%) / 4N5 / 5N (99.999%) Vacuum-Degassed
Standard Dimensions1–3 mm & 3–6 mm granules/shots, Ø 3×3 or 6×6 mm pellets, starter sources
Available ConfigurationsBase & refractory metals, optical fluorides/oxides, pre-melted e-beam slugs
Ordering & MOQSpecification-based quote · Prototype & production lots

Material & Engineering Overview

Spitting, outgassing pressure bursts, and pinhole defects in electron-beam and resistive thermal evaporation stem from trapped gas pockets or surface oxides in raw metal stock. Our evaporation metals (Al, Cu, Ti, Cr, Ni, Fe, Co, Ge, Si, Sn, In, W, Mo, Ta, V) and optical coating dielectrics (SiO2, Al2O3, TiO2 / pre-reduced Ti3O5, ZrO2, HfO2, MgF2) are vacuum-melted or vacuum-sintered to uniform pellet and granule sizing tailored for pocket liners and resistive boats.

Packaged by weight (50 g, 100 g, 250 g, 500 g, 1 kg) or piece count in argon-flushed containers with batch trace-metal COA.

Standard Shipment Documentation: Manufacturer Lot COA (GDMS or ICP trace impurity ppm breakdown) and net-weight sealed lot label.

Primary Research & Industrial Applications

  • Semiconductor lift-off metallization (Ti/Al, Cr/Cu, Ni/Ge ohmic contacts)
  • Precision optical thin-film interference filters, AR coatings, and laser mirrors (SiO2, Ti3O5, Ta2O5, MgF2)
  • OLED, perovskite solar cell, and sensor electrode thermal evaporation
  • Pre-melted hearth starter charges for 4 cc to 40 cc e-beam pockets

Nominal Material Reference Properties

Property / MetricNominal Reference Value (Grade Dependent)
Purity Grades99.99% (4N), 99.995% (4N5), 99.999% (5N)
Standard Metal Pellet SizesØ 3×3 mm, Ø 6×6 mm, Ø 6×12 mm cylindrical slugs; 1–3 & 3–6 mm shot
Optical Oxide Granules1–3 mm or 2–5 mm sintered low-spit granules & tablets
Pre-ConditioningVacuum degassed / clean acid-etched / inert packed
Pack Increments50 g, 100 g, 250 g, 500 g, 1,000 g lots

Reference values reflect typical sintered, fused, or wrought grades. Exact batch test figures are confirmed on your written quotation and accompanying lot Certificate of Analysis.

What to Specify in Your Quote Request

Specify element or compound (note sub-oxides like Ti3O5 if preferred over TiO2 for stable O2 stoichiometry!), purity (4N vs. 5N), pellet/granule size (mm), e-beam vs. resistive boat method, pocket volume (cc), and total weight in grams.

Include target quantity, destination country/postal code for express air freight calculation, and any special cleanroom bagging or certification requests.

Prepare Evaporation Materials RFQ ↗

Technical & Procurement FAQ

Why do optical coaters prefer Ti3O5 tablets/granules over white TiO2 for e-beam evaporation?
Stoichiometric TiO2 loses oxygen unevenly when first melted by an electron beam, causing pressure spikes and shifting refractive index; pre-reduced black semiconducting Ti3O5 melts smoothly with minimal outgassing and predictable O2 backfill stoichiometry.
Which crucible liner matches aluminum, titanium, or chromium e-beam evaporation?
Aluminum typically uses intermetallic/nitride or vitreous-carbon/BN liners (avoiding molten Al alloying constraints); Titanium is often evaporated directly from water-cooled Cu hearths or Fabmate/graphite barriers; Chromium sublimes cleanly from tungsten boats or graphite/Cu liners.
Are chromium evaporation rods or tungsten-plated Cr rods available for resistive sources?
Yes—both high-purity Cr sublimation granules/chunks for boats and Cr-coated tungsten evaporation rods can be quoted.
Cross-referenced catalog

Related technical materials.

Complementary furnaceware, substrates, PVD consumables, and refractory hardware frequently ordered together.

E-Beam Evaporation Crucible Pocket Liners (Cu / C (Graphite & Vitreous) / Mo / W / Al2O3 / BN, CAS 7440-50-8) — Thin Film Materials studio photographTB-PVD-LN
Thin Film MaterialsCu / C (Graphite & Vitreous) / Mo / W / Al2O3 / BN · 7440-50-8

E-Beam Evaporation Crucible Pocket Liners

Precision-tapered e-beam gun hearth liners in OFHC copper, purified & impermeable graphite, vitreous carbon, molybdenum, tungsten, alumina, and h-BN.

Purity / GradeOFHC Cu (99.99%), Purified Graphite/Vitreous C (<20 ppm), 99.95% Mo/W
Typical Size2 cc, 4 cc, 7 cc, 8 cc, 15 cc, 25 cc, 30 cc, 40 cc, & 100 cc
QCM Thin-Film Deposition Monitor Crystals (α-SiO2 + Au / Ag-Al Alloy Electrodes, CAS 14808-60-7) — Thin Film Materials studio photographTB-PVD-QCM
Thin Film Materialsα-SiO2 + Au / Ag-Al Alloy Electrodes · 14808-60-7

QCM Thin-Film Deposition Monitor Crystals

Precision 6.0 MHz and 5.0 MHz AT-cut plano-convex quartz crystal microbalance (QCM) thickness monitor sensors with gold or stress-relieving alloy electrodes in cleanroom dispenser packs.

Purity / GradeAT-Cut Piezoelectric Quartz (6.0 MHz & 5.0 MHz Fundamental)
Typical SizeØ 13.97 mm (0.550") Plano-Convex Standard Sensor Discs
Metal Sputtering Targets (Ti / Cr / Al / Cu / Ni / W / Mo / Ta, CAS 7440-32-6) — Thin Film Materials studio photographTB-PVD-MT
Thin Film MaterialsTi / Cr / Al / Cu / Ni / W / Mo / Ta · 7440-32-6

Metal Sputtering Targets

Vacuum-melted and thermomechanically forged pure metal and custom alloy planar sputtering targets (3N5–5N) sized for research and production magnetron cathodes.

Purity / Grade3N5 (99.95%) / 4N (99.99%) / 4N5 / 5N (99.999%)
Typical SizeØ 1", 2", 3", 4", 6", 8" × Thickness 1–12.7 mm; Rectangular plates
Custom & catalog specifications

Need pricing, lead time, or custom dimensions?

Submit your purity grade, geometry, quantity, and documentation requirements. Every order includes the producing mill's batch Certificate of Analysis (COA) and pre-shipment dimensional verification.

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