TB-PVD-EVEvaporation Materials
Vacuum-degassed 4N–5N metal evaporation slugs/shots and optical dielectric granules (SiO2, Ti3O5, MgF2, Al2O3) engineered for spit-free e-beam and thermal PVD.
Vacuum-degassed 4N (99.99%) Pre-Reduced Spit-Free Optical Grade titanium Sub-Oxide (Ti3O5 & TiO2) (Ti3O5 / TiO2, CAS 12065-65-5) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.
Prepared specifically for high-vacuum electron-beam and resistive thermal evaporation, our 4N (99.99%) Pre-Reduced Spit-Free Optical Grade titanium Sub-Oxide (Ti3O5 & TiO2) (Ti3O5 / TiO2, CAS 12065-65-5) deposition materials undergo vacuum degassing or high-temperature sintering to eliminate trapped volatiles and micro-voids that cause melt spitting and pinhole film defects.
Pre-reduced black Ti3O5 melts congruently without oxygen bursts (unlike white TiO2); evaporate from Cu hearths or Mo/Ta/Cu e-beam liners with ~1–2 × 10⁻⁴ Torr O2 backfill. Supplied in cleanroom argon-flushed containers by weight (50 g to 1,000 g lots) or piece count, accompanied by the manufacturer's batch trace-impurity Certificate of Analysis.
| Property / Metric | Nominal Reference Value (Grade Dependent) |
|---|---|
| Formula & CAS # | Ti3O5 / TiO2 (CAS 12065-65-5) |
| Purity Tiers | 4N (99.99%) Pre-Reduced Spit-Free Optical Grade |
| Density & Melting/Sublimation | 4.20 g/cm³ · MP/Subl. ~1,775 °C |
| Standard Forms | 1–3 mm & 2–4 mm black sintered granules; Ø 10–20 mm vacuum-sintered tablets |
| Recommended Liner / Boat | Pre-reduced black Ti3O5 melts congruently without oxygen bursts (unlike white TiO2) |
Reference values reflect typical sintered, fused, or wrought grades. Exact batch test figures are confirmed on your written quotation and accompanying lot Certificate of Analysis.
Specify Ti3O5 / TiO2 purity (4N (99.99%) Pre-Reduced Spit-Free Optical Grade), preferred pellet or granule size (1–3 mm & 2–4 mm black sintered granules; Ø 10–20 mm vacuum-sintered tablets), deposition method (e-beam hearth pocket cc volume vs. resistive W/Mo/Ta boat), and pack weight in grams.
Include target quantity, destination country/postal code for express air freight calculation, and any special cleanroom bagging or certification requests.
Prepare Titanium Sub-Oxide (Ti3O5 & TiO2) (Ti3O5 / TiO2) Evaporation Materials RFQ ↗Complementary furnaceware, substrates, PVD consumables, and refractory hardware frequently ordered together.
TB-PVD-EVVacuum-degassed 4N–5N metal evaporation slugs/shots and optical dielectric granules (SiO2, Ti3O5, MgF2, Al2O3) engineered for spit-free e-beam and thermal PVD.
TB-PVD-TIO2High-density hot-pressed titanium dioxide (TiO2 / TiO2-x, CAS 13463-67-7) ceramic sputtering targets in 4N (99.99%) purity, indium-bonded for arc-free RF and pulsed-DC thin-film deposition.
TB-EV-SIO2Vacuum-degassed 4N5 (99.995%) / 5N silicon dioxide (optical quartz) (SiO2, CAS 60676-86-0) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.
TB-PVD-LNPrecision-tapered e-beam gun hearth liners in OFHC copper, purified & impermeable graphite, vitreous carbon, molybdenum, tungsten, alumina, and h-BN.
Submit your purity grade, geometry, quantity, and documentation requirements. Every order includes the producing mill's batch Certificate of Analysis (COA) and pre-shipment dimensional verification.