Vacuum-degassed 4N5 (99.995%) / 5N silicon dioxide (optical quartz) (SiO2, CAS 60676-86-0) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.
Prepared specifically for high-vacuum electron-beam and resistive thermal evaporation, our 4N5 (99.995%) / 5N silicon dioxide (optical quartz) (SiO2, CAS 60676-86-0) deposition materials undergo vacuum degassing or high-temperature sintering to eliminate trapped volatiles and micro-voids that cause melt spitting and pinhole film defects.
Evaporate via electron-beam gun directly from a water-cooled copper hearth or molybdenum/graphite liner using a continuously swept defocused beam (SiO2 sublimes/melts locally). Supplied in cleanroom argon-flushed containers by weight (50 g to 1,000 g lots) or piece count, accompanied by the manufacturer's batch trace-impurity Certificate of Analysis.
| Property / Metric | Nominal Reference Value (Grade Dependent) |
|---|---|
| Formula & CAS # | SiO2 (CAS 60676-86-0) |
| Purity Tiers | 4N5 (99.995%) / 5N |
| Density & Melting/Sublimation | 2.20 g/cm³ · MP/Subl. ~1,713 °C |
| Standard Forms | 1–3 mm & 2–5 mm crystal-clear fused quartz granules; e-beam starter discs |
| Recommended Liner / Boat | Evaporate via electron-beam gun directly from a water-cooled copper hearth or molybdenum/graphite liner using a continuously swept defocused beam (SiO2 sublimes/melts locally) |
Reference values reflect typical sintered, fused, or wrought grades. Exact batch test figures are confirmed on your written quotation and accompanying lot Certificate of Analysis.
Specify SiO2 purity (4N5 (99.995%) / 5N), preferred pellet or granule size (1–3 mm & 2–5 mm crystal-clear fused quartz granules; e-beam starter discs), deposition method (e-beam hearth pocket cc volume vs. resistive W/Mo/Ta boat), and pack weight in grams.
Include target quantity, destination country/postal code for express air freight calculation, and any special cleanroom bagging or certification requests.
Prepare Silicon Dioxide (Optical Quartz) (SiO2) Evaporation Materials RFQ ↗Complementary furnaceware, substrates, PVD consumables, and refractory hardware frequently ordered together.
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TB-SIO2-WNPrecision double-side optically polished UV synthetic fused silica (JGS1), optical quartz (JGS2), and full-spectrum IR fused silica (JGS3) windows and wafer substrates.
Submit your purity grade, geometry, quantity, and documentation requirements. Every order includes the producing mill's batch Certificate of Analysis (COA) and pre-shipment dimensional verification.