TB-PVD-QCMQCM Thin-Film Deposition Monitor Crystals
Precision 6.0 MHz and 5.0 MHz AT-cut plano-convex quartz crystal microbalance (QCM) thickness monitor sensors with gold or stress-relieving alloy electrodes in cleanroom dispenser packs.
Epi-ready CMP-polished Single-Crystal quartz (AT-Cut, ST-Cut, X/Y/Z-Cut) substrates & windows (α-SiO2 (Single Crystal), CAS 14808-60-7) wafers and diced research squares with sub-nanometer surface roughness for PVD, PLD, MBE, and ALD.
Precision-grown and chemical-mechanical-polished (CMP) in a Class 100 cleanroom, our Single-Crystal quartz (AT-Cut, ST-Cut, X/Y/Z-Cut) substrates & windows (α-SiO2 (Single Crystal), CAS 14808-60-7) substrates provide atomically smooth, epi-ready surfaces (Ra < 0.2–0.5 nm) for thin-film epitaxy, pulsed laser deposition (PLD), magnetron sputtering, molecular beam epitaxy (MBE), and optical characterization.
Unlike amorphous fused silica, hydrothermal single-crystal α-quartz exhibits piezoelectricity, optical birefringence, and high crystalline thermal conductivity along the Z-axis (~10–12 W/m·K at RT, rising sharply at cryogenic temperatures). Standard research sizes include 5×5 mm, 10×10 mm, and 15×15 mm diced squares (0.5 mm or 1.0 mm thick) as well as Ø 1-inch, 2-inch, 3-inch, and 4-inch wafers in single-side (SSP) or double-side (DSP) polished finishes, packed in individual waffle trays or nitrogen-sealed cassettes with batch orientation and surface inspection data.
| Property / Metric | Nominal Reference Value (Grade Dependent) |
|---|---|
| Formula & CAS # | α-SiO2 (Single Crystal) (CAS 14808-60-7) |
| Crystal System / Grade | Trigonal (α-Quartz, P3₁21) · Hydrothermal Cultured Electronic & Optical Grade Single Crystal |
| Density | 2.65 g/cm³ |
| Standard Orientations | Z-Cut (0001), X-Cut, Y-Cut, AT-Cut (35°15'), ST-Cut (42°45') |
| Surface Finish (CMP) | Ra < 0.3 nm Double-Side Optical & SAW Polish |
Reference values reflect typical sintered, fused, or wrought grades. Exact batch test figures are confirmed on your written quotation and accompanying lot Certificate of Analysis.
Specify α-SiO2 (Single Crystal) crystallographic orientation (Z-Cut (0001), X-Cut, Y-Cut, AT-Cut (35°15'), ST-Cut (42°45')), dimensions and thickness (e.g., 10×10×0.5 mm or Ø 2" × 0.5 mm), SSP vs. DSP polish, edge orientation, and pack count.
Include target quantity, destination country/postal code for express air freight calculation, and any special cleanroom bagging or certification requests.
Prepare Single-Crystal Quartz (AT-Cut, ST-Cut, X/Y/Z-Cut) Substrates & Windows RFQ ↗Complementary furnaceware, substrates, PVD consumables, and refractory hardware frequently ordered together.
TB-PVD-QCMPrecision 6.0 MHz and 5.0 MHz AT-cut plano-convex quartz crystal microbalance (QCM) thickness monitor sensors with gold or stress-relieving alloy electrodes in cleanroom dispenser packs.
TB-SIO2-WNPrecision double-side optically polished UV synthetic fused silica (JGS1), optical quartz (JGS2), and full-spectrum IR fused silica (JGS3) windows and wafer substrates.
TB-SUB-LNOEpi-ready CMP-polished lithium niobate (LiNbO3) & lithium tantalate (LiTaO3) wafers (LiNbO3 / LiTaO3, CAS 12031-63-9) wafers and diced research squares with sub-nanometer surface roughness for PVD, PLD, MBE, and ALD.
TB-SIO2-TUOptically clear 99.99% (4N) fused quartz process tubes for CVD graphene/2D growth, semiconductor diffusion, photochemistry, and rapid-quench tube furnaces up to 1,150 °C.
Submit your purity grade, geometry, quantity, and documentation requirements. Every order includes the producing mill's batch Certificate of Analysis (COA) and pre-shipment dimensional verification.