Vacuum-degassed 4N (99.99%) Vacuum-Sublimed Grade silicon monoxide (SiO, CAS 10097-28-6) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.
Prepared specifically for high-vacuum electron-beam and resistive thermal evaporation, our 4N (99.99%) Vacuum-Sublimed Grade silicon monoxide (SiO, CAS 10097-28-6) deposition materials undergo vacuum degassing or high-temperature sintering to eliminate trapped volatiles and micro-voids that cause melt spitting and pinhole film defects.
SiO sublimes without melting; always use a baffled tantalum or molybdenum box boat (chimney source) to eliminate particle spitting during resistive evaporation. Supplied in cleanroom argon-flushed containers by weight (50 g to 1,000 g lots) or piece count, accompanied by the manufacturer's batch trace-impurity Certificate of Analysis.
| Property / Metric | Nominal Reference Value (Grade Dependent) |
|---|---|
| Formula & CAS # | SiO (CAS 10097-28-6) |
| Purity Tiers | 4N (99.99%) Vacuum-Sublimed Grade |
| Density & Melting/Sublimation | 2.13 g/cm³ · MP/Subl. ~Sublimes ~1,200–1,350 °C °C |
| Standard Forms | 2–6 mm dark brown/black vacuum-degassed chunks & granules |
| Recommended Liner / Boat | SiO sublimes without melting |
Reference values reflect typical sintered, fused, or wrought grades. Exact batch test figures are confirmed on your written quotation and accompanying lot Certificate of Analysis.
Specify SiO purity (4N (99.99%) Vacuum-Sublimed Grade), preferred pellet or granule size (2–6 mm dark brown/black vacuum-degassed chunks & granules), deposition method (e-beam hearth pocket cc volume vs. resistive W/Mo/Ta boat), and pack weight in grams.
Include target quantity, destination country/postal code for express air freight calculation, and any special cleanroom bagging or certification requests.
Prepare Silicon Monoxide (SiO) Evaporation Materials RFQ ↗Complementary furnaceware, substrates, PVD consumables, and refractory hardware frequently ordered together.
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TB-PVD-QCMPrecision 6.0 MHz and 5.0 MHz AT-cut plano-convex quartz crystal microbalance (QCM) thickness monitor sensors with gold or stress-relieving alloy electrodes in cleanroom dispenser packs.
Submit your purity grade, geometry, quantity, and documentation requirements. Every order includes the producing mill's batch Certificate of Analysis (COA) and pre-shipment dimensional verification.