Vacuum-degassed 4N (99.99%) / 4N5 Vacuum-Sintered tantalum pentoxide (Ta2O5, CAS 1314-61-0) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.
Prepared specifically for high-vacuum electron-beam and resistive thermal evaporation, our 4N (99.99%) / 4N5 Vacuum-Sintered tantalum pentoxide (Ta2O5, CAS 1314-61-0) deposition materials undergo vacuum degassing or high-temperature sintering to eliminate trapped volatiles and micro-voids that cause melt spitting and pinhole film defects.
Evaporate via e-beam from molybdenum, tungsten, or water-cooled copper pockets with controlled O2 backfill (or ion-assist) to maintain full optical transparency. Supplied in cleanroom argon-flushed containers by weight (50 g to 1,000 g lots) or piece count, accompanied by the manufacturer's batch trace-impurity Certificate of Analysis.
| Property / Metric | Nominal Reference Value (Grade Dependent) |
|---|---|
| Formula & CAS # | Ta2O5 (CAS 1314-61-0) |
| Purity Tiers | 4N (99.99%) / 4N5 Vacuum-Sintered |
| Density & Melting/Sublimation | 8.20 g/cm³ · MP/Subl. ~1,872 °C |
| Standard Forms | 1–3 mm & 2–4 mm sintered granules & tablets (white or pre-reduced dark grade) |
| Recommended Liner / Boat | Evaporate via e-beam from molybdenum, tungsten, or water-cooled copper pockets with controlled O2 backfill (or ion-assist) to maintain full optical transparency |
Reference values reflect typical sintered, fused, or wrought grades. Exact batch test figures are confirmed on your written quotation and accompanying lot Certificate of Analysis.
Specify Ta2O5 purity (4N (99.99%) / 4N5 Vacuum-Sintered), preferred pellet or granule size (1–3 mm & 2–4 mm sintered granules & tablets (white or pre-reduced dark grade)), deposition method (e-beam hearth pocket cc volume vs. resistive W/Mo/Ta boat), and pack weight in grams.
Include target quantity, destination country/postal code for express air freight calculation, and any special cleanroom bagging or certification requests.
Prepare Tantalum Pentoxide (Ta2O5) Evaporation Materials RFQ ↗Complementary furnaceware, substrates, PVD consumables, and refractory hardware frequently ordered together.
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Submit your purity grade, geometry, quantity, and documentation requirements. Every order includes the producing mill's batch Certificate of Analysis (COA) and pre-shipment dimensional verification.