Vacuum-degassed 4N (99.99%) Optical Grade (Pure or Y2O3/TiO2-Stabilized) zirconium dioxide (ZrO2, CAS 1314-23-4) evaporation pellets, granules, and slugs engineered for spit-free electron-beam and resistive thermal PVD.
Prepared specifically for high-vacuum electron-beam and resistive thermal evaporation, our 4N (99.99%) Optical Grade (Pure or Y2O3/TiO2-Stabilized) zirconium dioxide (ZrO2, CAS 1314-23-4) deposition materials undergo vacuum degassing or high-temperature sintering to eliminate trapped volatiles and micro-voids that cause melt spitting and pinhole film defects.
Evaporate by e-beam from copper hearths or molybdenum/tungsten liners with oxygen backfill; stabilized grades suppress phase-transition spitting during heating. Supplied in cleanroom argon-flushed containers by weight (50 g to 1,000 g lots) or piece count, accompanied by the manufacturer's batch trace-impurity Certificate of Analysis.
| Property / Metric | Nominal Reference Value (Grade Dependent) |
|---|---|
| Formula & CAS # | ZrO2 (CAS 1314-23-4) |
| Purity Tiers | 4N (99.99%) Optical Grade (Pure or Y2O3/TiO2-Stabilized) |
| Density & Melting/Sublimation | 5.68 g/cm³ · MP/Subl. ~2,715 °C |
| Standard Forms | 1–4 mm sintered granules and tablets |
| Recommended Liner / Boat | Evaporate by e-beam from copper hearths or molybdenum/tungsten liners with oxygen backfill |
Reference values reflect typical sintered, fused, or wrought grades. Exact batch test figures are confirmed on your written quotation and accompanying lot Certificate of Analysis.
Specify ZrO2 purity (4N (99.99%) Optical Grade (Pure or Y2O3/TiO2-Stabilized)), preferred pellet or granule size (1–4 mm sintered granules and tablets), deposition method (e-beam hearth pocket cc volume vs. resistive W/Mo/Ta boat), and pack weight in grams.
Include target quantity, destination country/postal code for express air freight calculation, and any special cleanroom bagging or certification requests.
Prepare Zirconium Dioxide (ZrO2) Evaporation Materials RFQ ↗Complementary furnaceware, substrates, PVD consumables, and refractory hardware frequently ordered together.
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Submit your purity grade, geometry, quantity, and documentation requirements. Every order includes the producing mill's batch Certificate of Analysis (COA) and pre-shipment dimensional verification.